Development of a SEM-SXES instrument

Terauchi, Masami*; Koshiya, Shogo*; Sato, Futami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Koike, Masato; Imazono, Takashi; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

For the purpose of applying a soft X-ray emission spectroscopy (SXES) instrument that was developed for TEM to more variety of materials we had extended the technique compliant with EPMAs, the energy region of 2000-4000 eV, and spectral mapping software. From the point of view of the evolution of analytical techniques to the SXES close to the scene of material development and evaluation, we began testing the device attached to a commercial SEM. A newly developed spectrometer was installed to the WDS port of a SEM (JEOL JSM-6480LV). Detector was used a multi-channel plate (MCP). Compared with TEM probe current and volume of irradiation become larger in SEM. The resultant invites a significant increase of signal and short measuring period. On the other hand, by contamination and bremsstrahlung background has been a problem on the measurement. Performance of the spectrometer is about 0.2 eV energy resolution at the L-edge of aluminum and it is equivalent performance with TEM and EPMA.