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Femtosecond laser driven cluster based plasma source for submicron soft X-ray and multicharged ions imaging of nano thickness objects

Faenov, A.*; Pikuz, T.; Fukuda, Yuji; Jinno, Satoshi   ; Sakaki, Hironao; Kanasaki, Masato; Kotaki, Hideyuki; Bulanov, S. V.; Pirozhkov, A. S.; Yogo, Akifumi; Hayashi, Yukio; Skobelev, I.*; Kato, Yoshiaki* ; Kando, Masaki; Kondo, Kiminori

A femtosecond laser driven cluster based soft X-ray and multicharged ions plasma source and on a high spatial resolution, large dynamic range LiF soft X-ray or a polymer dosimeter film CR-39 ion detectors. Such soft X-ray plasma source has been successfully applied for wide field of view contact or phase-contrast submicron radiography of ultrathin foils with different materials and thicknesses of 5-100 nm. All obtained results are allowed to propose a novel ultrafast soft X-ray and multicharged ions plasma source for diagnostics and metrology of large scale areas of free standing or mesh supported nano-thickness foils or other nanostructures and to use them in industry and science applications.

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