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Preparation of a dense TiO$$_{2}$$ thin film by oxidizing metallic titanium

金属チタン酸化による高屈折率材料TiO$$_{2}$$薄膜の作成

吉田 芙美子; 田中 桃子; 永島 圭介

Yoshida, Fumiko; Tanaka, Momoko; Nagashima, Keisuke

We prepared a dense rutile TiO$$_{2}$$ thin film that has a refractive index as high as that of the bulk crystal by oxidizing metallic Ti thin film. The TiO$$_{2}$$ thin film with a thickness of 260 nm is optically transparent and has low coefficients of absorption and scattering. We annealed a Ti thin film at 1000$$^{circ}$$C for oxidation and crystallization after deposition of metallic Ti by electron-beam evaporation. By optimizing the annealing conditions, we obtained a rutile TiO$$_{2}$$ thin film with a refractive index of 2.72 at a wavelength of 1030 nm, the highest refractive index ever reported.

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パーセンタイル:84.58

分野:Materials Science, Multidisciplinary

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