Time-resolved neutron reflectivity measurements for silver photo-diffusion in Ag/Ge-S films

Ag/Ge-S薄膜の銀光拡散に関する時間分解中性子反射率測定

坂口 佳史*; 朝岡 秀人  ; 魚住 雄輝; 川北 至信  ; 伊藤 崇芳*; 久保田 正人 ; 山崎 大   ; 曽山 和彦  ; Ailavajhala, M.*; Mitkova, M.*

Sakaguchi, Yoshifumi*; Asaoka, Hidehito; Uozumi, Yuki; Kawakita, Yukinobu; Ito, Takayoshi*; Kubota, Masato; Yamazaki, Dai; Soyama, Kazuhiko; Ailavajhala, M.*; Mitkova, M.*

アモルファスGeカルコゲナイド/銀への光照射により界面拡散が促進される。非破壊で観測できるJ-PARC(写楽)の中性子反射率測定を用いて、Agの2段階拡散プロセスのうち、初期の拡散層が光照射とともに急速に形成される様子を時間分解測定によって捉えた。

Silver photo-diffusion is one of the attractive phenomena observed in amorphous chalcogenide films such as As2S3 and GeSe2 because of their potential applications in, for example, photo-lithography, memory devices, and fabrication of optical elements. We report the results of neutron reflectivity measuremens for silver photo-diffusion in Ag/Ge-S films under light illumination. The neutron reflectivity measurements have been performed on a polarized neutron reflectometer (BL17, SHARAKU) at Materials and Life Science Experimental Facility (MLF), Japan Proton Accerelator Research Complex (J-PARC), Japan. By using the time-of-flight instrument with intensive pulsed neutrons produced by 300kW proton beams and sophisticated event recording system, time evolution of the neutron reflectivity under a light illumination has been revealed with, at least, 2-min time resolution. The reaction rate by the light illumination is discussed based on the detailed analysis of the time-resolved neutron reflectivity results.