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耐熱磁気センサの開発

Development of heat-resistant magnetic sensor

高屋 茂 ; 荒川 尚*; 欅田 理*

Takaya, Shigeru; Arakawa, Hisashi*; Keyakida, Satoshi*

耐熱性のフラックスゲート型磁気センサを開発した。高キュリー温度を有するパーメンジュールを磁性コア材料として採用し、同材料の磁気特性を考慮して外部磁場の検出原理の改良を行った。500$$^{circ}$$Cまでのセンサの出力特性を調べたところ、$$pm$$5Gの範囲で直線性を示すことが示された。500$$^{circ}$$Cにおける精度は、約0.85Gと評価された。

A heat-resistant flux gate magnetic sensor has been developed. Permendur, which has high Curie point, is employed as the magnetic core material and the detection method of the external magnetic field is modified. The characteristics of the developed magnetic sensor up to 500$$^{circ}$$C were evaluated. The sensor output increased linearly with the external magnetic field in the range of $$pm$$5 G and the standard deviation at 500$$^{circ}$$C was about 0.85G.

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