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Dependence of soft error rate in SOI SRAM on generated charge under buried oxide by high energy ion probes

Hazama, Masatoshi*; Abo, Satoshi*; Wakaya, Fujio*; Makino, Takahiro; Onoda, Shinobu; Oshima, Takeshi; Iwamatsu, Toshiaki*; Oda, Hidekazu*; Takai, Mikio*

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