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Micro/nanofabrication of poly($$_{L}$$-lactic acid) using focused ion beam direct etching

Oyama, Tomoko; Hinata, Toru*; Nagasawa, Naotsugu; Oshima, Akihiro*; Washio, Masakazu*; Tagawa, Seiichi*; Taguchi, Mitsumasa

Micro/nanofabrication of biocompatible and biodegradable poly($$_{L}$$-lactic acid) (PLLA) was evaluated using focused Ga ion beam direct etching. The fabrication performance was determined with different ion fluences and fluxes. It was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat because the resistance of PLLA to thermal deformation is decreased when above its glass transition temperature (approximately 60$$^{circ}$$C). By controlling the irradiation conditions, controlled micro/nanostructures of PLLA were fabricated, such as holes ($$phi$$80 nm) and alphabets (width: 100 nm). Moreover, focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds expected to have good cell attachment properties.

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Category:Physics, Applied

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