504000eV領域の軟X線平面結像型分光器の開発と電子顕微鏡への応用

Development of a soft X-ray flat-field spectrograph in the 50-4000 eV range and its application to electron microscopes

今園 孝志

Imazono, Takashi

50eVから4000eVまでの幅広いエネルギー領域に渡る軟X線領域の発光スペクトルを高効率・高分解能で計測可能な軟X線平面結像型回折格子分光器を開発した。これを電子顕微鏡に搭載することで、リチウムイオン二次電池、太陽電池材料等の機能性物質におけるナノスケール空間領域の構造評価とその化学結合状態分析を同時に実現できる。本稿では本分光器の特徴を述べると共に、透過型電子顕微鏡や電子プローブマイクロアナライザに搭載して得られた測定例について紹介する。

We have developed a soft X-ray flat-field spectrograph capable to detect soft X-ray emissions in 50-4000 eV with high spectral resolution. The spectrograph in combination with an electron microscope such as transmission electron microscope (TEM) and electron probe micro-analyzer (EPMA) makes it possible to simultaneously perform not only the structural and elemental analyses of such functional materials as lithium-ion batteries and solar cells, but also chemical-bonding states analysis in the nano-scale area. In this article, the development of the soft X-ray flat-field spectrograph and preliminary experimental results measured by the spectrograph installed in EPMA and TEM are described.