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Development of a wide band multilayer grating in 1-3.5 keV

Imazono, Takashi; Koike, Masato

Soft X-ray emission spectroscopy is a powerful tool for a nondestructive evaluation technique for the electronic structure of a buried layer such as an absorber in thin-film solar cells. In our previous study, a wide band W/B$$_4$$C multilayer grating spectrograph has been successfully developed, but the detection area cannot cover the energy range of 1-3.5 keV, in which the characteristic X-ray lines of Cu-$$L$$ (0.9 keV), In-$$L$$ (3.4 keV), Se-$$L$$ (1.4 keV) from a CIS solar cell are included. We newly developed a wide band Ni/C multilayer grating to cover the energy range from 1 keV to 3.5 keV at a constant incidence angle.

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