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電子顕微鏡用平面結像型軟X線回折格子発光分光器の開発とその性能

Development and performance of a flat-field spectrograph for soft X-ray emission spectroscopy to be installed in electron microscopes

今園 孝志; 小池 雅人; 小枝 勝*; 長野 哲也*; 笹井 浩行*; 大上 裕紀*; 米澤 善央*; 倉本 智史*; 寺内 正己*; 高橋 秀之*; 飯田 信雄*; 村野 孝訓*

Imazono, Takashi; Koike, Masato; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*; Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*

電子顕微鏡に搭載でき、50$$sim$$4000eV領域の発光スペクトルを高分解能計測できる平面結像型回折格子分光器を開発した。回折格子の光学特性は、放射光を用いて回折効率を、レーザープラズマ軟X線を用いて分解能を評価すると共に、透過型電子顕微鏡に搭載した軟X線分光器を用いて、金属リチウムからのK発光スペクトル(54eV)や透明酸化物半導体(ITO)からのInとSnのL発光スペクトル(3.6keV近傍)の高分解能計測等に成功した。

We developed a flat-field spectrograph for soft X-ray emission spectroscopy in 50-4000 eV to be able to be installed in electron microscopes. The diffraction efficiency and resolving power of the spectrograph were evaluated by using synchrotron radiation and laser produced plasma soft X-ray light sources, respectively. The spectral performance of the spectrograph installed in a transmission electron microscope was evaluated. The K emission spectrum from metallic lithium and the L emission lines of indium and tin from tin-doped indium oxide (ITO) were clearly observed around 54 eV and 3.6 keV, respectively.

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