Submicron scale image observation with a grazing incidence reflection-type single-shot soft X-ray microscope

Baba, Motoyoshi*; Nishikino, Masaharu; Hasegawa, Noboru; Tomita, Takuro*; Minami, Yasuo*; Takei, Ryota*; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Suemoto, Toru

A grazing incidence reflection-type soft X-ay microscope, using a Fresnel zone plate and a soft X-ray laser with wavelength 13.9 nm and pulse width 7 ps, was developed. Submicron size groove structures made on a Pt film were clearly captured at a single shot exposure, with spatial resolution of about 360 nm. A wide field view of 100 m square was secured under the Kohler illumination. This microscope also had a large depth of focus of more than 100 m and was proven to have a sufficient performance for observing surface morphological changes.