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1$$sim$$3.5keV領域をカバーするワイドバンドNi/C多層膜回折格子を用いた平面結像型軟X線分光計の設計

Design of a flat-field soft X-ray spectrometer with a wideband Ni/C multilayer grating covering the range of 1 to 3.5 keV

今園 孝志; 小池 雅人; 倉本 智史*; 長野 哲也*; 小枝 勝*

Imazono, Takashi; Koike, Masato; Kuramoto, Satoshi*; Nagano, Tetsuya*; Koeda, Masaru*

CIS薄膜太陽電池において光吸収層を構成するCu, In, SeからのL発光線(Cu: 0.9keV, In: 3.4keV, Se: 1.4keV)を計測するための平面結像型軟X線回折格子分光器を設計した。当該領域(0.9$$sim$$3.4keV)を一定入射角でカバーするために、非周期Ni/C多層膜をラミナー型不等間隔溝回折格子に積層したワイドバンド多層膜回折格子を考案した。回折格子及び検出器の駆動機構が不要なため、全エネルギー領域を同時に高分解計測することができる。

We designed a flat-field soft X-ray spectrometer to detect $$L$$ X-rays from 1 to 3.5 keV emitted from the CIS absorber consisting of Cu, In, and Se in a CIS solar cell. We invented a wideband multilayered grating, which was coated with an aperiodic Ni/C multilayer on a laminar-type varied-line-spacing grating, to cover the whole energy range at a constant angle of incidence. Since there is no mechanical movement of the grating and a detector, the spectrometer can provide quick and accurate measurements in the 1-3.5 keV range as well as high resolution analysis.

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