A Flexible dielectrophoretic device with high-aspect-ratio pillar arrays fabricated by proton beam writing

Nishikawa, Hiroyuki*; Ayugase, Ginya*; Tokita, Hiroya*; Uchida, Satoshi*; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro

Dielectrophoresis (DEP) has been widely used to trap micro particles and microbes such as E.coli. We previously reported the introduction of the DEP devices with SU-8 high-aspect-pillar arrays on a silicon substrate by proton beam writing (PBW) so as to improve their trapping capability. In this study, new DEP devices with the SU-8 high-aspect-pillar arrays have been fabricated on a polyethylene terephthalate (PET) film to add bendability. The fabrication was performed with proton beams (1.0-1.7 MeV, 1.0 m ). The proton fluence to form the pillar on the PET film was determined in the experiments. As a result, the bendable DEP devices with the pillar arrays were successfully developed on the PET films to be widely used in industries.