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Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing

Kada, Wataru*; Miura, Kenta*; Kato, Hijiri*; Saruya, Ryota*; Kubota, Atsushi*; Sato, Takahiro; Koka, Masashi; Ishii, Yasuyuki; Kamiya, Tomihiro; Nishikawa, Hiroyuki*; Hanaizumi, Osamu*

The Mach-Zehnder (MZ) optical structures were previously fabricated in a Poly-methyl-methacrylate (PMMA) thin film by Proton Beam Writing (PBW). The enhancement of optical transmittance in the structures is, however, required for industrial use. In this study, the MZ optical waveguides have been fabricated in a poly-dimethyl-siloxane (PDMS) thin film which has the higher optical permeability. The PDMS films were spin-coated on a silicon wafer (40 $$times$$ 20 $$times$$ 0.5 mm$$^3$$) with a thickness of approximately 30 $$mu$$m. The MZ waveguides were drawn by a 750 keV proton microbeam of 1$$mu$$m in diameter having the penetration depth of 18 $$mu$$m with fluence of 40-100 nC/mm$$^2$$. The beam writing was carried out combining an electric scanner and a mechanical sample-stage. The observation of the single-mode light propagation of 1.55 $$mu$$m fiber-laser in the MZ waveguides indicated that the optical transmittance have been successfully enhanced using PDMS.

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