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High contrast imaging with a contact soft X-ray microscope controlling water layer thickness around specimens

Kado, Masataka; Kishimoto, Maki; Tone, Shigenobu*; Tamotsu, Satoshi*; Yasuda, Keiko*; Aoyama, Masato*; Shinohara, Kunio*

Soft X-ray microscope using water window X-ray as light sources has been developed as epoch-making technology to observe living hydrated biological cells with high spatial resolution. Controlling the thickness of water layer is critical to observe living biological cells since the absorption of the soft X-ray by the water layer degrade the cell images. It is important to keep the thickness of the water layer at 5 $$mu$$m to obtain clear cell images. We have designed new silicon nitride windows with spacer and groove structure to keep the water layer thickness at 5 $$mu$$m and have succeeded to obtain high resolution cell images.

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