Fabrication of flexible dielectrophoresis devices for capturing micro-particles using proton beam writing

Nishikawa, Hiroyuki*; Sano, Ryo*; Uchida, Satoshi*; Kitamura, Akane; Ishii, Yasuyuki; Kamiya, Tomihiro

no abstracts in English

Language	:	Japanese
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Meeting title	:	第9回高崎量子応用研究シンポジウム
Held date	:	2014/10
Location (city)	:	高崎
Location (country)	:	日本
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Keywords	:	誘電泳動; 集束量子線描画
Research Facility	:	TIARA(イオン照射研究施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	芝浦工業大学

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Registration No. : BB20142438
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