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Neutron reflectometry as a nondestructive tool to analyze buried interfaces in layered thin films

多層膜内の埋もれた界面の非破壊的解析手法としての中性子反射率法

武田 全康  

Takeda, Masayasu

X-ray and neutron reflectometer have now widely used for the structural analysis of a surface and interfaces inside thin films and multilayers. Neutron is an ideal probe for the reflectometry because of its transparency for most of materials, its sensitivity to light elements, and magnetic moments in the materials. The neutron reflectometers SOFIA and SHARAKU have been installed at Materials Life Science Facility (MLF) of Japan Proton Accelerator Research Complex (J-PARC) where the most intense pulsed neutron in the world is available. This is a brief introduction of the neutron reflectometery and a report of current activity of the reflectometers in J-PARC.

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