Complete polarization measurements with Mo/Si multilayer polarizers

Imazono, Takashi

The Kansai Photon Science Institute of Japan Atomic Energy Agency has an X-ray laser (XRL) system. The XRL source having a wavelength of 13.9 nm has been used for interference measurements taking advantage of the short pulse duration and coherence. In XRL applications, many types of soft X-ray optical components, especially Mo/Si multilayer mirrors, are widely used and indispensable. The optical properties had been evaluated by using a soft X-ray reflectometer at a JAEA dedicated beamline, BL-11, of the SR Center. Besides, the polarization performance of Mo/Si multilayers mirrors, which are well-known as highly efficient polarizers, had been characterized by a high-precision nine-axis soft X-ray ellipsometer installed in the most downstream of BL-11. In this annual meeting, polarization control techniques of synchrotron radiation and XRL sources with Mo/Si multilayer polarizers will be presented.