Light ion microbeam analysis / processing system and its improvement

Koka, Masashi; Ishii, Yasuyuki; Yamada, Naoto; Okubo, Takeru; Kada, Wataru*; Kitamura, Akane; Iwata, Yoshihiro*; Kamiya, Tomihiro; Sato, Takahiro

A MeV-class light ion microbeam system has been developed for micro-analysis and micro-fabrication with high spatial resolution at 3-MV single-ended accelerator in Takasaki Ion Accelerators for Advanced Radiation Application of Takasaki Advanced Radiation Research Institute, Sector of Nuclear Science Research, Japan Atomic Energy Agency. This report describes the technical improvements for the main apparatus (the accelerator, beam-transport lines, and microbeam system), and auxiliary equipments/ parts for ion beam applications such as Particle Induced X-ray/Gamma-ray Emission (PIXE/PIGE) analysis, 3-D element distribution analysis using PIXE-Computed Tomography(CT), Ion Beam-Induced Luminescence (IBIL) analysis, and Proton Beam Writing with the microbeam scanning, with functional outline of these apparatus and equipments/parts.