Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source, 2

Sasaki, Akira; Sunahara, Atsushi*; Nishihara, Katsunobu*

For the development of laser plasma pumped (LPP) extreme ultraviolet light (EUV) source, we develop a new hydrodynamics model, which is applicable to the fragmentation of liquid Sn by the pre-pulse laser irradiation. A 2-dimensional Lagrange simulation code with mesh reorganization algorithms as well as phase transition dynamics is developed and initial application to an analysis of the particle formation during the evaporation of a hot Sn droplet is presented.