Development of time-resolved small-angle X-ray scattering system using soft-X-ray laser

Kumada, Takayuki   ; Otobe, Tomohito*; Nishikino, Masaharu*; Hasegawa, Noboru*; Hayashi, Terutake*

The non-thermal effect on femtosecond laser ablation has been focused on for development of high-precision micromachining technique. In this study, we newly focused on a time-resolved grazing-incidence small-angle X-ray scattering (GI-SAXS) measurement. In principle, the GI-SAXS can measure time-evolution of the morphology of the voids, which would be stretched in normal to the sample surface by the non-thermal effect. We can quantitatively evaluate the non-thermal effect from the asymmetric morphology of the voids. We succeeded in observing the scattering from a gold-deposited optical grating (1740 lines / mm), but not from a post-ablated crater on a gold plate. We have to decrease the noise level of the camera to pick up dispersed signal from disordered system such as the crater.