Fabrication and magnetic control of YFeO cantilevers

Seo, Y.-J.*; Harii, Kazuya; Takahashi, Ryo*; Chudo, Hiroyuki ; Oyanagi, Koichi*; Qiu, Z.*; Ono, Takahito*; Shiomi, Yuki*; Saito, Eiji

We have fabricated ferrite cantilevers in which their vibrational properties can be controlled by external magnetic fields. Submicron-scale cantilever structures were made from YFeO films by physical etching combined with the use of a focused ion beam milling technique. We found that the cantilevers exhibit two resonance modes which correspond to horizontal and vertical vibrations. Under external magnetic fields, the resonance frequency of the horizontal mode increases, while that of the vertical mode decreases, quantitatively consistent with our numerical simulation for magnetic forces. The changes in resonance frequencies with magnetic fields reach a few percent, showing that an efficient magnetic control of resonance frequencies was achieved.