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Report No.
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Technique of microfabrication for fluoropolymers by using ion beam irradiation

Kitamura, Akane

We developed three types of microfabrication for fluoropolymers using ion beam irradiation. The smooth Teflon surface becomes rough by a keV ion beam irradiation. At a high fluence, needle-like protrusions were thickly formed all over the surface. When 3-MeV proton microbeam scanned on the surface along a spiral from the center, a porous conical structure was formed. It was caused by volume expansion along the ion trajectories. Ion track membranes of poly(vinylidene fluoride) (PVDF) were developed by a track etching technique using irradiation with a 330-MeV $$^{40}$$Ar ion beam in an oxygen atmosphere. Ion tracks were etched without any oxidant. Oxidant is essential for conventional methods but it causes serious deterioration in the quality of PVDF membranes. Therefore, our technique is useful as an oxidant-free track-etching process.

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