検索対象:     
報告書番号:
※ 半角英数字
 年 ~ 
 年

レーザーラマン法による炭素薄膜の評価

Analysis of carbon thin films by laser Raman method

金正 倫計; 神谷 潤一郎; 小泉 欧児*; 那須 昌吾*

Kinsho, Michikazu; Kamiya, Junichiro; Koizumi, Oji*; Nasu, Shogo*

J-PARC 3GeVシンクロトロン(RCS)では、リニアックで加速された負水素イオン(H$$^{-}$$イオン)を薄膜で陽子に変換する荷電変換入射方式を採用している。この薄膜の寿命が加速器の運転時間を決めるため、荷電変換膜のビームに対する破壊機構を知ることは、加速器を安定に運転する上で重要である。本研究では、荷電変換膜のビームによる破壊機構を解明することを目的として、ラマン分光法により、薄膜の結晶性, 膜組成, 応力等を評価した。RCSで使用しているフォイルは、レーザーによる入熱に対して、大きな応力が発生することが分かった。

Crystallinity, crystalline structure and internal force of thin films were measured by Laser Raman spectroscopy for the purpose of analyzing the fracture mechanism of the charge exchange foil due to beam hitting in this study. Thin films were used four types of HBC foil, pure carbon film (C foil) formed by arc discharge method, graphene, and carbon nanotube (CNT foil). As a result of changing the laser output and measuring the Raman peak shift of each foil, the HBC foil and the C foil had large Raman peak shift change, the D-band was negative and the G-band was opposite sign with positive. On the other hand, the graphene and the CNT foil showed small change in Raman peak shift, and both D-band and G-band were negative. From these results, it was found that a large stress occurs in the HBC foil and the C foil due to the heat load by the laser which was used for Raman spectrum measurements.

Access

:

- Accesses

InCites™

:

Altmetrics

:

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.