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Radiation-mode optical microscopy for CVD growth of graphene on gold

Terasawa, Tomoo   ; Taira, Takanobu*; Obata, Seiji*; Yasuda, Satoshi   ; Saiki, Koichiro*; Asaoka, Hidehito  

Since the solubility of carbon in copper is very low, monolayer graphene can be selectively grown by chemical vapor deposition (CVD) on a copper substrate. Thus, CVD growth of graphene is considered the most promising technique for the next-generation electronics. Here we report the CVD growth of graphene on gold substrates which also have the low solubility of carbon. We achieved the in-situ observation of the CVD growth of graphene on a gold foil by radiation-mode optical microscopy (Rad-OM). Figure shows the Rad-OM images of a gold foil at the growth time of 15, 30, and 40 min at 900$$^{circ}$$C under Ar, H$$_{2}$$, and CH$$_{4}$$ gas flow at 240, 8, and 5 sccm, respectively. The bright islands, corresponding to graphene confirmed by Raman spectroscopy, appeared between two trenches of the gold foil and grew parallel to the trenches. We will discuss the growth kinetics of graphene on gold, on the basis of the in-situ Rad-OM observation.

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