Development of the new method to utilize the titanium vacuum chamber as a vacuum pump

Kamiya, Junichiro   ; Hikichi, Yusuke*; Wada, Kaoru*

Non-evaporable getter (NEG) coating, which was developed at CERN, is the breakthrough method, which makes a beam pump a vacuum pump by coating a getter material on the beam pipe surface. The usage of the NEG coating has widely spread in the accelerators in recent years. On the other hand, J-PARC uses titanium, which is a low activation material, as a material for the beam pipe. If the titanium oxide on the surface can be removed, the titanium beam pip plays the role of the vacuum pump because the pure titanium is a getter material. In this presentation, we report on the method of oxide film removal by the sputtering method and vacuum performances of the titanium vacuum chamber as the getter pump.