Some methods of making titanium vacuum chamber act as getter pump for UHV/XHV

Kamiya, Junichiro   ; Takano, Kazuhiro; Yuza, Hiromu*; Wada, Kaoru

The NEG coating, which has been developed in CERN, is a revolutionary technique that can make a beam pipe act as a vacuum pump by coating the getter materials with the ability to adsorb/absorb gas molecules on the beam pipe surface. The NEG materials are alloys of titanium, zirconium, and vanadium. Titanium is one of the getter materials. In high-power beam accelerators, titanium has been used as the beam pipe chamber material due to its low radioactivation characteristics. The ordinal titanium surface has no getter function because it is covered with titanium-oxide film. The new technique, which removes the titanium-oxide surface by the sputtering and makes the titanium vacuum chamber itself the vacuum pump like NEG coated chamber, has been developed. After sputtering the inner surface of the titanium chamber, we obtained clear evidence that shows the chamber acts as a vacuum pump. We have also tried to make a titanium chamber with a getter function only by baking. Dependence of the getter characteristics on the baking temperature will also be reported.