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Titanium nitride-coated ceramic break for wall current monitors with an improved broadband frequency response

Shobuda, Yoshihiro   ; Toyama, Takeshi*

The beam impedance of a ceramic break with thin titanium nitride coating (TiN) consists of resistive wall term caused by TiN, radiation term, and capacitive term made by the ceramic itself in parallel. The entire wall current continues to run in TiN even when the skin depth is much larger than the chamber thickness, except for the extremely thin TiN. This characteristic is useful in developing a wall current monitor with an improved frequency response.



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