Effect of O and SR ON-OFF on band bending at SiO/Si(001) interfaces

Tsuda, Yasutaka ; Ogawa, Shuichi*; Yoshigoe, Akitaka ; Sakamoto, Tetsuya; Takakuwa, Yuji*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2021年第82回応用物理学会秋季学術講演会
Held date	:	2021/09
Location (city)	:	名古屋(online)
Location (country)	:	日本
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Keywords	:	シリコン; 半導体; 酸化; 放射光光電子分光; Si
Research Facility	:	SPring-8(大型放射光施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	東北大学

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Registration No. : BB20210731
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