Neutron reflectometry tomography for imaging and depth structure analysis of thin films with in-plane inhomogeneity

面内異方性を有する薄膜試料のイメージング及び構造解析のための中性子反射率トモグラフィーの開発

青木 裕之  ; 小川 紘輝*; 竹中 幹人*

Aoki, Hiroyuki; Ogawa, Hiroki*; Takenaka, Mikihito*

Neutron reflectometry (NR) has been used for the depth structure analysis of materials at the surface and interface with a sub-nanometric resolution. Conventional NR provides averaged information for an area larger than several square centimeters; therefore, it cannot be applied to an interface with an in-plane inhomogeneity. In this study, the NR imaging of the in-plane structure of polymer thin films was achieved. The tomographic reconstruction of the spatially resolved NR profiles obtained by a sheet-shaped neutron beam provided a two-dimensional image of the in-plane interface morphology. The depth distribution of the neutron scattering length density was obtained by analyzing the position-dependent NR profile at a local area less than 0.1 mm. The current NR tomography method enables NR measurements for an interface with an inhomogeneous structure. It also provides information on the three-dimensional distribution of the atomic composition near the surface and interfaces for various materials.