Development of a titanium vacuum chamber with UHV getter function

Kamiya, Junichiro   ; Takano, Kazuhiro; Wada, Kaoru; Yuza, Hiromu*

Titanium is one of the getter materials. In high-power beam accelerators, titanium has been used as the beam pipe chamber material due to its low radioactivation characteristics. The ordinal titanium surface has no getter function because it is covered with titanium-oxide film. The new technique, which removes the titanium-oxide surface by the sputtering and makes the titanium vacuum chamber itself the vacuum pump like NEG coated chamber, has been developed. After sputtering the inner surface of the titanium chamber, we obtained clear evidence that shows the chamber acts as a vacuum pump. We have also tried to make a titanium chamber with a getter function only by baking. Dependence of the getter characteristics on the baking temperature has been obtained.