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Report No.

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Miyagawa, Reina*; Kamibayashi, Daisuke*; Nakamura, Hirotaka*; Hashida, Masaki*; Zen, H.*; Somekawa, Toshihiro*; Matsuoka, Takeshi*; Ogura, Hiroyuki*; Sagae, Daisuke*; Seto, Yusuke*; Shobu, Takahisa  ; Tominaga, Aki; Eryu, Osamu*; Ozaki, Narimasa*

We evaluated Laser-Induced Periodic Surface Structure (LIPSS) crystal structures using the stress imaging station at BL22XU of JAEA-BL on SPring-8. Crystallization of LIPPS was used different two types laser these are Ti:Sapphire laser (wavelength: 800 nm) and MIR-FEL (mid-infrared free electron laser, wavelength 11.4 $$mu$$m). These lasers are different in the laser pulse structure and the wavelength. We investigated on the effects of formed LIPSS crystallization using different kind of laser. Measured synchrotron X-ray energy is 30 keV and beam size is 20 $$mu$$m. Detector of diffracted X-ray is two-dimensional detector (PILATUS300K, DECTRIS). LIPSS formed using Ti:Sapphire laser has deformed structure with good crystallinity. LIPSS formed using MIR-FEL has dislocation or fault without structural stress. These results show depending on select of laser forming LIPPS structure. These information becomes important a point of the functional application of LIPSS.



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