Automation of precise gas control for material-process researches; Application to synchrotron radiation real-time observation of surface reactions

Nakamura, Takafumi*; Yamamoto, Yukio*; Arakawa, Masakazu*; Maruyama, Akio*; Yoshigoe, Akitaka 

Surface chemistry experimental end-station at BL23SU in SPring-8 is widely used to study various surfaces and interfaces of functional materials by means of soft X-rays synchrotron radiation. To analyze surface chemical reactions between gas and solid surfaces, an accurate control of flow-rates of gases is essential. This paper describes a computerized automatic gas flow control system to improve the accuracy and reproducibility of gas-surface reaction experiments in the pressure range of ultra-high vacuum (molecular flow) conditions. The system uses feedback control to operate the slow-leak valve to control the gas-pressure. As a result, the system achieved results equivalent to those of a skilled experimenter.