Analysis of activation and deterioration mechanism of Ti-Zr-V NEG coating by XPS

Kamiya, Junichiro   ; Abe, Kazuhide; Kobata, Masaaki  ; Tsuda, Yasutaka   ; Fukuda, Tatsuo  ; Fujimori, Shinichi   ; Morohashi, Yuko ; Yamada, Ippei ; Yoshigoe, Akitaka 

Sequence measurements with XPS have been performed to understand more detail about the activation and deterioration mechanism. The sample of a titanium plate with Ti-Zr-V coating of 1 um thickness was prepared. The sample was set in the surface science station in the BL23SU of SPring-8. At first, the XPS measurements for the sample surface were performed during the sample temperature was raised to 250C. After that, the XPS was subsequently performed during the injection of oxygen gas into the chamber while keeping the sample temperature at 250C, which corresponds to the accelerated deterioration test. After that, the depth profile of the sample was measured with another XPS apparatus with an X-ray tube by argon etching. The result showed that the surface Zr gets the oxygen from Ti oxide and V oxide at the first stage of the activation and the oxygen of the Zr oxide would diffuse to the bulk in the continuous temperature rise. It was revealed that the concentrated oxygen in the coating exists in the forms of mainly Zr oxide and Ti oxide in the second place.