BeCu material vacuum chamber with NEG coating

Wada, Kaoru*; Shiga, Takashi; Okahashi, Kazunari*; Kamiya, Junichiro   ; Kobata, Masaaki  ; Morohashi, Yuko ; Abe, Kazuhide; Kishikawa, Shinsuke*; Sasaki, Masanao*; Kuroiwa, Masahide*; Fukuda, Tatsuo  ; Koarai, Kazuma   

Tokyo Electronics Co., Ltd. manufactures and sells ultra-high vacuum equipment using BeCu material. By integrating this with the NEG coating technology from the Japan Atomic Energy Agency, the company has developed a getter-type BeCu vacuum chamber that can operate without electricity. In a series of experiments, the chamber was opened to the atmosphere, evacuated, and then subjected to a baking (activation) process at 200 for 8.5 hours, repeated five times. The results showed that the NEG coating significantly improved the pumping speed and reduced the ultimate pressure. Additionally, during buildup pressure measurements, this process was repeated five times. While there was no substantial difference in pressure before the tests, a noticeable improvement in pressure was observed with the NEG coating as the tests progressed. This demonstrates that the NEG coating not only enhances the efficiency of the vacuum system but also plays a crucial role in maintaining an ultra-high vacuum environment.