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X-ray scattering study of interfacial roughness correlation in Mo/Si multilayers fabricated by ion beam sputtering

Ulyanenkov, A.*; Matsuo, R.*; Omote, Kazuhiko*; Inaba, Katsuhiko*; Harada, Jimpei*; Ishino, Masahiko; Nishii, Masanobu; Yoda, Osamu

no abstracts in English

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Category:Physics, Applied

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