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Chemical bonding state analysis of silicon carbide layers in Mo/SiC/Si multilayer mirrors by soft X-ray emission and absorption spectroscopy

Muramatsu, Yasuji; Takenaka, Hisataka*; Ueno, Yuko*; Gullikson, E. M.*; Perera, R. C. C.*

no abstracts in English

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Category:Physics, Applied

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