Chemical bonding state analysis of silicon carbide layers in Mo/SiC/Si multilayer mirrors by soft X-ray emission and absorption spectroscopy

Muramatsu, Yasuji; Takenaka, Hisataka*; Ueno, Yuko*; Gullikson, E. M.*; Perera, R. C. C.*

no abstracts in English

Language	:	English
Journal	:	Applied Physics Letters
Volume	:	77
Number	:	17
Pages	:	p.2653 - 2655
Publication Year/Month	:	2000/10
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Paper URL	:	https://doi.org/10.1063/1.1318231
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Keywords	:	軟X線発光分光; 軟X線吸収分光; 放射光; シリコンカーバイド; 多層膜; 化学結合状態; 電子構造
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Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:51.45 Category:Physics, Applied
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Registration No. : A20000031
JAEA Abstracts No. : 290092
Paper Submission No. : 17812

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