Electrical Properties of carbon/aluminum-implanted 6H-SiC

Oshima, Takeshi; Ito, Hisayoshi; Yoshikawa, Masahito

no abstracts in English

Language	:	English
Journal	:	Proceedings of 1st International Workshop on Ultra-Low-Loss Power Device Technology (UPD2000)
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Pages	:	p.181 - 182
Publication Year/Month	:	2000/06
Meeting title	:	1st International Workshop on Ultra-Low-Loss Power Device Technology (UPD2000)
Held date	:	2000/06
Location (city)	:	Nara
Location (country)	:	Japan
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DOI for research data	:
Keywords	:	シリコンカーバイド; アクセプタ不純物; イオン注入; 炭素共注入; ホール濃度
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Registration No. : B20000056
JAEA Abstracts No. : 280468
Paper Submission No. : 17447

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