Study of "buried" interfaces of Mo/Si multilayers using soft-X-ray emission spectroscopy

Miyata, Noboru; Ishikawa, Sadayuki*; Yanagihara, Mihiro*; Watanabe, Makoto*

no abstracts in English

Language	:	Japanese
Journal	:	Photon Factory News
Volume	:	18
Number	:	2
Pages	:	p.25 - 29
Publication Year/Month	:	2000/08
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Keywords	:	軟X線発行分光; 埋もれた界面; Mo/Si多層膜
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Registration No. : A20000185
JAEA Abstracts No. : 280806
Paper Submission No. : 17743

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