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Journal Articles

Roles of excess minority carrier recombination and chemisorbed O$$_{2}$$ species at SiO$$_{2}$$/Si interfaces in Si dry oxidation; Comparison between p-Si(001) and n-Si(001) surfaces

Tsuda, Yasutaka; Yoshigoe, Akitaka; Ogawa, Shuichi*; Sakamoto, Tetsuya*; Yamamoto, Yoshiki*; Yamamoto, Yukio*; Takakuwa, Yuji*

Journal of Chemical Physics, 157(23), p.234705_1 - 234705_21, 2022/12

https://doi.org/10.1063/5.0109558
 Times Cited Count：0 Percentile：0.01(Chemistry, Physical)

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Roles of excess minority carrier recombination and chemisorbed O$$_2$$ species at SiO$$_2$$/Si interfaces in Si dry oxidation

Tsuda, Yasutaka; Yoshigoe, Akitaka; Ogawa, Shuichi*; Sakamoto, Tetsuya*; Yamamoto, Yoshiki*; Yamamoto, Yukio*; Takakuwa, Yuji*

no journal, , 

no abstracts in English

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