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竹井 敏*; 大島 明博*; 大山 智子; 伊藤 健太*; Sugahara, Kigen*; 柏倉 美紀*; 古澤 孝弘*; 田川 清一*; 花畑 誠*
Japanese Journal of Applied Physics, 53(11), p.116505_1 - 116505_7, 2014/11
被引用回数：10 パーセンタイル：39.23(Physics, Applied)電子線(EB)及び極短紫外(EUV)リソグラフィ用レジストとしての直鎖状天然多糖類の応用を検討した。天然多糖類はウェハ上へのスピンコートや現像過程に水を使うことができるため、有機溶媒を必要とせず、環境にやさしい次世代のデバイス製造に利用可能である。開発したレジストは重量平均分子量83,000、70mol%のヒドロキシ基を有する。200mmウェハへのスピンコートが可能であり、100-400nmのピラーパターン描画時の電子線への感度が10
C/cm
と高く、シリコン系中間層を用いた場合CF
プラズマエッチング時の十分な選択比を持つことを確認した。また、これらの実験結果から、EUV領域へも高い感度を有することが予測された。
想田 光*; 中尾 政夫*; 野田 章*; 頓宮 拓*; 伊藤 清一*; 岡本 宏巳*; 百合 庸介; 神保 光一*; Grieser, M.*; He, Z.*
Proceedings of 3rd International Particle Accelerator Conference (IPAC '12) (Internet), p.397 - 399, 2012/05
The longitudinal temperature of 40 keV 
Mg
beams was measured through bunch length measurement during laser cooling at S-LSR. The bunch length was measured as time-domain signals from a pair of parallel-plate electrostatic pickups. Injected non-cooled beams gave a bunch length of 2.5 m and cooled beams had two components of broad and sharp distributions. The broad distribution had a longitudinal length of 2.2 m, which is close to that of the initial beam. The length of the sharp distribution shrunk to 0.25 m and is expected as a cooled part. The capture efficiency of cooling, which represents the ratio of particle numbers of the cooled part and the total particle number, varied with laser detuning. With a scanning range of 2 GHz, it was improved from 66% to 92%, while the bunch became longer by 10% with scanning. A new scheme for improving the capture efficiency will be applied to attain a strong signal from a low-current low-temperature beam.
野田 章*; 中尾 政夫*; 想田 光*; 頓宮 拓*; 伊藤 清一*; 岡本 宏巳*; 大崎 一哉*; 百合 庸介; 神保 光一*; Grieser, M.*; et al.
Proceedings of 3rd International Particle Accelerator Conference (IPAC '12) (Internet), p.394 - 396, 2012/05
Mg ion beams have been successfully laser-cooled both in longitudinal and transverse directions at S-LSR in ICR, Kyoto University. The cooling rate, however, is not strong enough to realize a crystalline beam due to heating from intra-beam scattering (IBS). Reduction of the beam intensity is inevitable to suppress this IBS effect, which, however, had resulted in poor S/N ratio for observation of the transverse beam size. We, therefore, describe a new beam-scraping scheme: The scheme selects out ions in the distribution tail of the transverse phase space, keeping the beam density in the core part by simultaneous application of multi-dimensional laser cooling and beam scraping. The strategy to realize the scheme effectively has been searched by combination of the beam experiments and computer simulations.
