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Kasugai, Atsushi; Takahashi, Koji; Sakamoto, Keishi; ; Mitsunaka, Yoshika*; ; Ikeda, Yoshitaka; Tsuneoka, Masaki; Imai, Tsuyoshi
Proc. of 13th Topical Conf. on Applications of Radio Frequency Power to Plasmas, p.449 - 452, 1999/00
no abstracts in English