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論文

Mach-Zehnder polymer waveguides fabricated using proton beam writing

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 桐生 弘武*; 小澤 優介*; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

JAEA-Review 2012-046, JAEA Takasaki Annual Report 2011, P. 126, 2013/01

https://doi.org/10.11484/jaea-review-2012-046

In this study, a PMMA-based MZ waveguide was fabricated utilizing PBW to develop a thermo-optic switch. A 10-$$mu$$m-thick PMMA film was firstly spin-coated onto the 15 $$mu$$m SiO$$_2$$ film as the under cladding. Cores of a MZ waveguide with 8 $$mu$$m width were secondary drawn at the dose of 100 nC/mm$$^2$$ in the PMMA film using PBW with H$$^+$$ beam of the size of $$sim$$1.1 $$mu$$m and beam current of $$sim$$50 pA at 1.7 MeV. The MZ waveguide was drawn by symmetrically coupling two Y junctions and its branching angle was set to 2$$^circ$$ to reduce optical branching loss. Finally a 10-$$mu$$m-thick PMMA film was deposited again on the sample as an upper cladding by spin-coating. The mode-field diameter of near field patterns with about 10 $$mu$$m width was observed at $$lambda$$= 1.55 $$mu$$m on the basis of a fundamental mode without no higher-order modes which required to develop our objective MZ type thermo-optic switch for optical-fiber telecommunication. The result of the observation showed that the PMMA-based single-mode MZ waveguide for $$lambda$$= 1.55 $$mu$$m was successfully fabricated using PBW. As the next step to develop the optical switch, we will form a Ti thin-film heater and A$$ell$$ electrodes on the MZ waveguide using photolithography and wet-etching processes.

論文

Fabrication of Mach-Zehnder polimer waveguides by a direct-drawing technique using a focused proton beam

三浦 健太*; 佐藤 隆博; 石井 保行; 桐生 弘武*; 小澤 優介*; 江夏 昌志; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

Key Engineering Materials, 534, p.158 - 161, 2013/00

https://doi.org/10.4028/www.scientific.net/KEM.534.158
 被引用回数：5 パーセンタイル：89.82(Nanoscience & Nanotechnology)

We develop a thermo-optic switch of the Mach-Zehnder type polymer waveguide using proton beam writing (PBW). In this study, we succeeded in near field pattern Mach-Zehnder type single mode polymer waveguides at a wavelength of 1550 nm. The samples for the waveguides were composed with a 15-$$mu$$-thick under-cladding layer of SiO$$_2$$ deposited on a Si substrate using radio-frequency sputtering and a 10-$$mu$$m-thick PMMA film spin-coated onto the SiO$$_2$$ layer as a core layer. We wrote Mach-Zehnder type waveguides having a width of 8 $$mu$$m on the PMMA layer by PBW with a beam size of $$sim$$1 $$mu$$m and a beam current of 50 pA. After this writing, the 10-$$mu$$m-thick-PMMA layer was deposited again as an upper-cladding layer by spin-coating. In the observation of these waveguides, the light of laser of 1550-nm wavelength was injected into one side of the waveguide through a single-mode fiber. From the observation of the light emitted from the opposite side of the waveguides, near field patterns was observed using a vidicon camera with an optical microscope. The observation result demonstrated that the light traveled by single mode in the Mach-Zehnder type polymer waveguide. In the conference, we will report the development of the Mach-Zehnder type polymer waveguide in detail. In addition, the thermo-optic switch at the wavelength of 1550 nm by the Mach-Zehnder type polymer waveguide will also be briefly reported.

論文

Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using focused proton beam

三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

Key Engineering Materials, 497, p.147 - 150, 2012/00

https://doi.org/10.4028/www.scientific.net/KEM.497.147
 被引用回数：7 パーセンタイル：95.12(Engineering, Electrical & Electronic)

Proton beam writing (PBW) is an attractive technique for next-generation micro-fabrication. We study the fabrication of optical waveguides of polymer materials using PBW. In this study, the optical waveguides of photorefractive polysilane "GLASSIA" was fabricated. The samples for the waveguides were prepared as follows; (1) An under-cladding layer of SiO$$_2$$ having a thickness of $$sim$$15 $$mu$$m was deposited on a Si substrate using radio-frequency sputtering. (2) A polysilane layer having a thickness of $$sim$$10 $$mu$$m was spin-coated onto the SiO$$_2$$ layer as a core layer. Optical waveguides were drawn by scanning a 1.7 MeV focused proton beam with $$sim$$1 $$mu$$m size and beam current of 50 pA which was produced by a submicron focused ion beam system connected with the 3 MV single-ended accelerator at JAEA. The drawing was carried out on the dose of 100, 200, 300 nC/mm$$^2$$ each. After the drawing, the sample surfaces were observed using an optical microscope and AFM. The observation result showed that the refractive index was changed and the cores of the waveguides were formed. We will report the details of above observation results in the conference. The change ratio of the refraction index will also be reported on the basis of the obtained result by inserting light ($$lambda$$ = 1.55 $$mu$$m) into the waveguide structure through a single-mode fiber.

論文

Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using focused proton beam

三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

Key Engineering Materials, 497, p.147 - 150, 2011/12

https://doi.org/10.4028/www.scientific.net/KEM.497.147
 被引用回数：6 パーセンタイル：2.48

Single mode straight waveguides for a wavelength of 1.55-$$mu$$m were, so far, fabricated using a proton beam writing (PBW) technique. We report the fabrication of Y-junction polymer waveguides with a polymethyl methacralate (PMMA) layers as the expansion of these straight waveguides using PBW in the conference. The PMMA layers consisted of an under-cladding layer of SiO$$_2$$ having a thickness of $$sim$$ 15-$$mu$$m deposited on an Si substrate, a PMMA layer having a thickness of $$sim$$ 10-$$mu$$m spin-coated onto the SiO$$_2$$ layer and a Y-junction waveguide with a width of 8-$$mu$$m in a PMMA core layer. The Y-junction waveguides with the angle of 2$$^{circ}$$ were drawn using the 1.7 MeV proton beam with 1-$$mu$$m in diameter and a beam current of 10 pA for a dose of 100 nC/mm$$^2$$. After spin-coating the PMMA layer with $$sim$$ 10-$$mu$$m thickness as an upper cladding on the irradiated PMMA layer, the near field pattern (NFP) of an 8-$$mu$$m-width Y-junction waveguide was observed using a tunable-wavelength laser. The observation showed that the fabrication of waveguide was succeeded because its waveguide was single mode and the intensity ratio between the two outputted lights was the almost same; 1:0.96. We also briefly report the next plans of the measurement of the refractive indices of proton-irradiated PMMA and SiO$$_2$$ films and the fabrication of a thermo-optic polymer switch based on a Mach-Zehnder interferometer waveguide.

口頭

Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using proton beam writing

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; 横山 彰人; 神谷 富裕; et al.

no journal, , 

In this work, Mach-Zehnder (MZ) type waveguides of PMMA and photorefractive polysilane were fabricated using proton beam writing (PBW) in order to construct thermo-optic switches. Especially, the waveguides of photorefractive polysilane were fabricated to search a better optical material for the MZ type waveguides. We drew optical waveguides in PMMA and photorefractive polysilane films at a total dose of 100 nC/mm$$^2$$ using 1.7 MeV H$$^+$$ beam focused to about 1 $$mu$$m. In this drawing, a core width and a branching angle were set to 8 $$mu$$m and 2$$^circ$$ to work as single-mode waveguide and to reduce a branching loss of light, respectively. The optical transmission with single mode was observed from the two MZ type waveguides of PMMA and photorefractive polysilane films in its experiments. This observation demonstrated that the fabrication of the optical waveguides was succeeded in PMMA and photorefractive polysilane films. In the conference, the fabrication of the MZ type waveguides and the observation results of optical transmission will be presented in detail.

口頭

イオンビームによる光機能素子の作製

三浦 健太*; 菊地 秀輔*; 桐生 弘武*; 稲田 和紀*; 小澤 優介*; 花泉 修*; 山本 春也; 杉本 雅樹; 吉川 正人; 川口 和弘; et al.

no journal, , 

イオンビーム照射による発光デバイス及び光スイッチ等の光機能素子の形成技術の開発を行った。発光デバイスの開発では、これまでの成果からSiO$$_2$$部材にSi$$^+$$の注入と、その後の1200$$^circ$$C前後でのアニールにより青色発光することを見いだしており、本研究ではこの部材を用いてより低温のアニールで発光する部材の開発を目指した。Si$$^+$$とC$$^+$$の注入、及び大気中での700$$^circ$$C、25分間のアニールを行うことで、可視領域での発光を観測できた。さらに、Si$$^+$$及びC$$^+$$の注入量の比によって、発光ピーク波長がシフトすることも確認し、発光色を制御できる可能性も示した。一方、光スイッチの開発では、波長1.55$$mu$$m帯のマッハツェンダー(Mach-Zehnder: MZ)型光スイッチの実現を目指し、PMMAにプロトンビーム描画(Proton Beam Writing: PBW)技術で光導波路を描画することでMZ型導波路の製作を試みた。試料として、Si基板上に下部クラッド層のSiO$$_2$$膜(15$$mu$$m)及び光導波路製作層のPMMA膜(8$$mu$$m)を製作した。これに1.7MeV、1$$mu$$m$$phi$$のH$$^+$$ビームを用いてPBWにより8$$mu$$m幅の左右対称に対向したY分岐型の導波路を描画し、さらに、上部クラッド層としてこの照射後の試料にPMMAを10$$mu$$m厚で成膜した。製作した導波路に対して波長1.55$$mu$$mの光を通した結果、出射光が一つであることを確認し、MZ型光導波路として光波の分岐及び合流が行えることを示した。

口頭

Mach-Zehnder type thermo-optic switch fabricated by proton beam writing

小澤 優介*; 久保田 仁*; 三浦 健太*; 花泉 修*; 野口 克也*; 佐藤 隆博; 石井 保行; 江夏 昌志; 高野 勝昌*; 大久保 猛; et al.

no journal, , 

A Mach-Zehnder (MZ) type thermo-optic switch for a wavelength of 1.55 $$mu$$m was fabricated using Proton Beam Writing (PBW) in this study. The fabrication was carried out by the following processes: (1) a SiO$$_2$$ under-cladding was deposited on a Si substrate, (2) a 10-$$mu$$m-thick PMMA film was spin coated onto the SiO$$_2$$ layer as a core, (3) a MZ type waveguide with the width of 8 $$mu$$m was drawn on the PMMA film by PBW with the beam size of 1.1 $$mu$$m$$phi$$ and current of 50 pA at 1.7 MeV, (4) a PMMA film was deposited again on the sample as an upper-cladding layer, and (5) a titanium heater as a phase shifter and aluminum electrodes were formed on the sample by vacuum evaporation with UV lithography and wet etching. In the operation test of this switch, the intensity of 1.55 $$mu$$m laser light through the switch was measured by a vidicon camera at the exit side along with varying the electric power for a titanium heater (the switching power). The intensity ratio of the output lights for ON/OFF of the heater was obtained as a function of the switching power. The result showed the fabricated switch worked as an MZ type thermo-optic switch with an ON/OFF ratio of 9.0 dB on a switching power of 43.9 mW.

口頭

Prototype of thermo-optic switch consisting of Mach-Zehnder polymer waveguide drawn by focused proton beam

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; 横山 彰人; 神谷 富裕; et al.

no journal, , 

The Mach-Zehnder (MZ) type thermo-optic switch consisting of two MZ couplers, two phase shifting branches and a titanium thin-film heater over one branch was prototyped in this work. A MZ type waveguide pattern with a core width of 8 $$mu$$m and a MZ coupling angle of 2$$^{circ}$$ in a PMMA film was drawn by a 1.7 MeV focused proton beam with the beam size of about 1 $$mu$$m and the total dose of 100 nC/mm$$^2$$. The titanium thin-film heater and aluminum electrodes were formed using conventional photolithography and wet-etching processes. In the operation test of the switch, a light with a wave length of 1.55 $$mu$$m was injected into one side of the switch through a single-mode optical fiber, and the output light from another side of the switch was observed by an IR camera with varying an electric power supplied to the heater. A switching power was estimated to be 43.9 mW for an On/Off ratio of 9.0 dB in the test. This result showed that the switching power could be reduced compared with those of commercial silica-based switches.

口頭

イオンビーム照射による光機能デバイスの作製技術の開発

三浦 健太*; 花泉 修*; 加田 渉*; 小澤 優介*; 稲田 和紀*; 久保田 篤志*; 河嶋 亮広*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

no journal, , 

イオンビーム照射技術を用いた光スイッチや発光素子の光機能デバイスの製作を目的として、(1)プロトンビーム描画を利用したマッハツェンダー(MZ)導波路型熱光学スイッチ、(2)SiO$$_{2}$$部材へのSiとCイオンの注入と1200$$^{circ}$$C以下でアニール処理を行うことによる可視領域で発光する材料の開発を行った。(1)では、Si基板上に下部クラッドのSiO$$_2$$層と光伝搬用のPMMA層をそれぞれ5$${mu}$$mと8$${mu}$$mに積層した試料に、1.7MeV, 1$${mu}$$m$$phi$$のH$$^{+}$$ビーム(50pA)を用いて、ドーズ量100nC/mm$$^2$$で、線幅8$${mu}$$mのY分岐を左右対称に接合した長さ$$sim$$30mmのMZ型の線を描画した。この後、上部クラッドとして10$$mu$$mのPMMA層を積層し、導波路とした。これを光スイッチとするため、フォトリソグラフィによりTi薄膜ヒーターとA$$ell$$電極を試料表面に形成し、波長1.55$${mu}$$mにおけるスイッチ特性を評価した。この結果、スイッチング電力は約43.9mW、ON/OFF比は約9.0dBと測定され、これらは従来型の石英系熱光学スイッチに比べ優位なものであった。(2)では、SiO$$_{2}$$部材への150keV-Siの注入量を5$$times$$10$$^{16}$$/cm$$^2$$に固定し、75keV-Cの注入量を1, 3, 5, 7$$times$$10$$^{16}$$/cm$$^2$$と変えた。照射後、大気中、1000$$^{circ}$$Cにおいて25分間のアニールを行い、発光の観測を行った結果、可視域の発光が観測できた。更に、Cイオンの照射量によって、発光ピーク波長がシフトすることから、発光色をイオンの注入量で制御可能であることも明らかになった。

口頭

プロトンビーム描画による導波路型光スイッチの試作

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 横山 彰人; 神谷 富裕; 平谷 雄二*; 桐生 弘武*; 小澤 優介*; 加田 渉*; et al.

no journal, , 

導波路型熱光スイッチの開発を目的として、プロトン(H$$^+$$)ビーム描画(Proton Beam Writing: PBW)を用いて、PMMA(Polymethylmethacrylate)にマッハツェンダー(Mach-Zehnder: MZ)型の光導波路(波長1.55$$mu$$m用)を直接描画し、これに位相変調用の薄膜ヒーターを付加した熱光スイッチを以下の4工程で製作した。(1)Si基板上に下部クラッド層としてSiO$$_2$$(15$$mu$$m厚)をスパッタリング法で成膜し、この上にPMMA層(10$$mu$$m厚)をスピンコート法で成膜した。(2)PMMA膜にH$$^+$$ビームを照射すると屈折率が向上して導波路となることを利用し、PBWで種々な幅の直線導波路を描画し、波長1.55$$mu$$mに対してシングルモードとなるコア幅を特定した。(3)このコア幅を持つ分岐角2$$^circ$$のMZ形状を描画し、この上にPMMAの上部クラッド層(10$$mu$$m厚)を成膜してMZ型導波路を製作した。(4)これを熱光学スイッチとするため、分岐した一方の導波路上にTi薄膜ヒーター及びこれに電流を供給するAl配線を蒸着法で製作した。以上の工程により開発したヒーター付きMZ型導波路の動作試験を行った結果、光の強弱を確認することができ、PBWを用いたMZ導波路型光スイッチの実現の可能性が示された。

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