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Proessdorf, A.*; Rodenbach, P.*; Grosse, F.*; Hanke, M.*; Braun, W.*; Riechert, H.*; Hu, W.; Fujikawa, Seiji*; Kozu, Miwa; Takahashi, Masamitsu
Surface Science, 606(17-18), p.1458 - 1461, 2012/09
Times Cited Count:1 Percentile:4.23(Chemistry, Physical)Tinkham, B. P.*; Romanyuk, O.*; Braun, W.*; Ploog, K. H.*; Grosse, F.*; Takahashi, Masamitsu; Kaizu, Toshiyuki*; Mizuki, Junichiro
Journal of Electronic Materials, 37(12), p.1793 - 1798, 2008/12
Times Cited Count:4 Percentile:30.00(Engineering, Electrical & Electronic)
4) phases investigated by
surface X-ray diffractionTinkham, B. P.*; Braun, W.*; Ploog, K. H.*; Takahashi, Masamitsu; Mizuki, Junichiro; Grosse, F.*
Journal of Vacuum Science and Technology B, 26(4), p.1516 - 1520, 2008/07
Times Cited Count:3 Percentile:25.30(Engineering, Electrical & Electronic)
O
/Si(001) heterostructures grown by molecular beam epitaxy using a high temperature effusion sourceTinkham, B. P.*; Takahashi, Masamitsu; Jenichen, B.*; Watahiki, Tatsuro*; Braun, W.*; Ploog, K. H.*
Semiconductor Science and Technology, 21(12), p.1552 - 1556, 2006/12
Times Cited Count:6 Percentile:36.31(Engineering, Electrical & Electronic)The structure of epitaxially grown Pr
O
on Si(001) has been investigated by grazing incidence X-ray diffraction and X-ray reflectivity. We report experimental results from measurements made in situ, after growth, and during annealing to determine the stability of Pr
O
at temperatures relevant for complementary metal oxide semiconductor (CMOS) processing. Pr
O
is evaporated and converted to Pr
O
using an effusion source operating at 1970
C. Two different phases of Pr
O
have been identified in the as-grown films in addition to a silicate layer that forms upon nucleation at the Si interface. The cubic Pr
O
nucleates as a single crystal and grows in greater proportion to the polycrystalline hexagonal Pr
O
. The crystal structure of the as-grown film is stable during annealing up to about 800
C at which point the Pr
O
is consumed at the expense of the silicate phase.