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Hatae, Takaki; Hayashi, Toshimitsu; Yatsuka, Eiichi; Kajita, Shin*; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Yahagi, Kenichi*; Shinobu, Katsuya*; Ono, Takehiro; et al.
Journal of Plasma and Fusion Research SERIES, Vol.9, p.253 - 258, 2010/08
Hatae, Takaki; Howard, J.*; Ebizuka, Noboru*; Yoshida, Hidetsugu*; Nakatsuka, Masahiro*; Fujita, Hisanori*; Narihara, Kazumichi*; Yamada, Ichihiro*; Funaba, Hisamichi*; Hirano, Yoichi*; et al.
Journal of Physics; Conference Series, 227, p.012002_1 - 012002_6, 2010/06
Times Cited Count：2 Percentile：66.93(Physics, Applied)Ostermeyer, M.*; Kong, H.-J.*; Kovalev, V. I.*; Harrison, R. G.*; Fotiadi, A. A.*; M
gret, P.*; Kalal, M.*; Slezak, O.*; Yoon, J. W.*; Shin, J. S.*; et al.
Laser and Particle Beams, 26(3), p.297 - 362, 2008/09
Times Cited Count：41 Percentile：55.6(Physics, Applied)Yoshida, Hidetsugu*; Takeuchi, Norihiro*; Okada, Hajime; Fujita, Hisanori*; Nakatsuka, Masahiro*
Reza Kenkyu, 36(9), p.573 - 578, 2008/09
Yoshida, Hidetsugu*; Nagasawa, Muneyuki*; Okada, Hajime; Fujita, Hisanori*; Nakatsuka, Masahiro*; Park, H.*
Reza Kenkyu, 36(9), p.566 - 572, 2008/09
Izawa, Yasukazu*; Nishihara, Katsunobu*; Tanuma, Hajime*; Sasaki, Akira; Murakami, Masakatsu*; Sunahara, Atsushi*; Nishimura, Hiroaki*; Fujioka, Shinsuke*; Aota, Tatsuya*; Shimada, Yoshinori*; et al.
Journal of Physics; Conference Series, 112, p.042047_1 - 042047_4, 2008/00
Times Cited Count：8 Percentile：93.57(Physics, Fluids & Plasmas)In the development of a high power EUV source used in the EUV lithography system, we have been constructed EUV database of laser-produced tin plasma by the theoretical and experimental studies. On the basis of our understanding, the optimum conditions of lasers and plasmas were clarified, and we proposed the guidelines of laser plasma to obtain clean, efficient and high power EUV source for the practical EUV lithography system. In parallel to such studies, novel targets and high power laser system to generate the optimized EUV source plasma have been developed.
Kitamura, Shigeru; Hatae, Takaki; Nakatsuka, Masahiro*; Fujita, Hisanori*; Yoshida, Hidetsugu*
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no abstracts in English
Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Hatae, Takaki; Kitamura, Shigeru
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no abstracts in English
Hatae, Takaki; Kajita, Shin*; Hayashi, Toshimitsu; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Ebisawa, Katsuyuki*; Kusama, Yoshinori
no journal, ,
no abstracts in English
Hatae, Takaki; Narihara, Kazumichi*; Yamada, Ichihiro*; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Minami, Takashi*; Funaba, Hisamichi*; Kajita, Shin*; Kitamura, Shigeru; et al.
no journal, ,
no abstracts in English
Hatae, Takaki; Hayashi, Toshimitsu; Kajita, Shin*; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Yahagi, Kenichi*; Shinobu, Katsuya*; Ono, Takehiro; Kusama, Yoshinori
no journal, ,
no abstracts in English
Hatae, Takaki; Yamada, Ichihiro*; Yoshida, Hidetsugu*; Narihara, Kazumichi*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Funaba, Hisamichi*; Minami, Takashi*; Kajita, Shin*; Tojo, Hiroshi; et al.
no journal, ,
no abstracts in English
Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Hatae, Takaki; Kitamura, Shigeru
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no abstracts in English
Hatae, Takaki; Yatsuka, Eiichi; Hayashi, Toshimitsu; Kajita, Shin*; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Shinobu, Katsuya*; Yahagi, Kenichi*; Takematsu, Hiroyuki*; et al.
no journal, ,
no abstracts in English
Hatae, Takaki; Kitamura, Shigeru; Sakuma, Takeshi; Hamano, Takashi; Tojo, Hiroshi; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Narihara, Kazumichi*; Yamada, Ichihiro*; et al.
no journal, ,
Hatae, Takaki; Yatsuka, Eiichi; Hayashi, Toshimitsu; Yoshida, Hidetsugu*; Takematsu, Hiroyuki*; Ono, Takehiro; Kusama, Yoshinori; Fujita, Hisanori*; Nakatsuka, Masahiro*
no journal, ,
no abstracts in English
Hatae, Takaki; Hayashi, Toshimitsu; Yatsuka, Eiichi; Yoshida, Hidetsugu*; Fujita, Hisanori*; Nakatsuka, Masahiro*; Ono, Takehiro; Kusama, Yoshinori
no journal, ,
Hatae, Takaki; Yatsuka, Eiichi; Yoshida, Hidetsugu*; Fujita, Hisanori*; Tsubakimoto, Koji*; Nakatsuka, Masahiro*; Yasuhara, Ryo*; Tojo, Hiroshi; Sakuma, Takeshi
no journal, ,
no abstracts in English
