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Journal Articles

Development of high resistant anti-reflection coating by using Al$$_{2}$$O$$_{3}$$/SiO$$_{2}$$ multilayer

Ochi, Yoshihiro; Nagashima, Keisuke; Okada, Hajime; Tanaka, Momoko; Tateno, Ryo*; Furukawa, Yasuyuki*; Sugiyama, Akira

Proceedings of SPIE, Vol.8885, p.88851Z_1 - 88851Z_6, 2013/11

 Times Cited Count:4 Percentile:86.95(Optics)

We designed and fabricated high damage-resistant AR coating using Al$$_{2}$$O$$_{3}$$/SiO$$_{2}$$ layers. As a result of irradiation test using 500 ps pulses at 1 kHz, the damage threshold of the AR coating was estimated to be over 36 J/cm$$^{2}$$ (average value). We also fabricated high reflection (HR) mirrors using Al$$_{2}$$O$$_{3}$$/SiO$$_{2}$$ layers added on Ta$$_{2}$$O$$_{5}$$/SiO$$_{2}$$ layers and measured damage threshold of them for 7 ns, 500 ps, and 1 ps pulses.

Journal Articles

Development of the minimally invasive laser therapy for endometrial lesions

Shigetomi, Hiroshi*; Oka, Kiyoshi; Oi, Hidekazu*; Furukawa, Naoto*; Yoshida, Shozo*; Kawaguchi, Ryuji*; Nagai, Akira*; Haruta, Shoji*; Yanase, Yasuhito*; Akasaka, Julia*; et al.

Nihon Reza Igakkai-Shi, 33(2), p.131 - 135, 2012/08

no abstracts in English

Journal Articles

Modeling of atomic processes of multiple charged ions in plasmas and its application to the study of EUV light sources

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Plasma and Fusion Research (Internet), 6(Sp.1), p.2401145_1 - 2401145_4, 2011/12

Atomic processes and radiation from multiple charged ions in plasmas are of the interest in the investigation of plasma wall interaction and transport of impurity ions in the fusion devices. The emission from multiple charged ions is also investigated for the development of extreme ultra violet light (EUVL) sources at $$lambda=13.5 nm$$. Efficient emission through the 4d-4f + 4p-4d transition array is obtained from tin ions. An optimization of pumping conditions of laser produced plasma sources is carried out theoretically and experimentally. We also investigate an extension of the plasma light sources to short wavelength to $$lambda=6.5 nm$$ using Gd and Tb plasmas. We discuss requirements to the atomic structure, rate coefficient and collisional radiative codes to determine ion abundance and level population as a function of plasma temperature and density, to calculate the radiation intensity as well as emission spectrum.

Journal Articles

Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Applied Physics Letters, 97(23), p.231501_1 - 231501_3, 2010/12

 Times Cited Count:15 Percentile:52.55(Physics, Applied)

Emission spectrum and conversion efficiency of laser produced terbium plasmas are investigated theoretically on the basis of computational atomic data. It is shown that calculation reproduces the main peak of the experimental spectrum at $$lambda=6.5$$nm, which originates from 4$$d$$-4$$f$$ transitions of near palladium like ions (Tb$$^{19+}$$). Simple model of the isothermal expansion of plasma suggests that efficient emission can be obtained by pumping a plasma with a laser pulse with an intensity approximately one order of magnitude grater than in the case of tin sources at $$lambda=13.5$$nm.

Journal Articles

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

Sasaki, Akira; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishihara, Katsunobu*; Fujioka, Shinsuke*; Nishikawa, Takeshi*; Koike, Fumihiro*; Ohashi, Hayato*; Tanuma, Hajime*

Journal of Applied Physics, 107(11), p.113303_1 - 113303_11, 2010/06

 Times Cited Count:45 Percentile:82.67(Physics, Applied)

Atomic processes in Sn plasmas are investigated for application to extreme-ultraviolet (EUV) light sources used in microlithography. An atomic model of Sn is developed on the basis of calculated atomic data using the Hebrew University Lawrence Livermore Atomic Code (HULLAC). Resonance and satellite lines from singly and multiply excited states of Sn ions are identified. The wavelengths of the 4$$d$$-4$$f$$ + 4$$p$$-4$$d$$ transitions of Sn$$^{5+}$$ to Sn$$^{13+}$$ are investigated. Results of calculation are compared with those of the charge exchange spectroscopy, measurement of the emission spectrum of the laser produced plasma EUV source, and the opacity measurement of a radiatively heated Sn sample. A reasonable agreement is observed between calculated and experimental EUV emission spectra. The spectral emissivity and opacity of Sn plasmas are calculated using a full collisional radiative (CR) model as a function of electron temperature and ion density.

Journal Articles

Recent progress in the energy recovery linac project in Japan

Sakanaka, Shogo*; Akemoto, Mitsuo*; Aoto, Tomohiro*; Arakawa, Dai*; Asaoka, Seiji*; Enomoto, Atsushi*; Fukuda, Shigeki*; Furukawa, Kazuro*; Furuya, Takaaki*; Haga, Kaiichi*; et al.

Proceedings of 1st International Particle Accelerator Conference (IPAC '10) (Internet), p.2338 - 2340, 2010/05

Future synchrotron light source using a 5-GeV energy recovery linac (ERL) is under proposal by our Japanese collaboration team, and we are conducting R&D efforts for that. We are developing high-brightness DC photocathode guns, two types of cryomodules for both injector and main superconducting (SC) linacs, and 1.3 GHz high CW-power RF sources. We are also constructing the Compact ERL (cERL) for demonstrating the recirculation of low-emittance, high-current beams using above-mentioned critical technologies.

Journal Articles

Atomic modeling of the plasma EUV sources

Sasaki, Akira; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Tanuma, Hajime*

High Energy Density Physics, 5(3), p.147 - 151, 2009/09

 Times Cited Count:11 Percentile:39.67(Physics, Fluids & Plasmas)

We study the radiative properties of the EUV source to address conditions to achieve an output power and efficiency required for its application to the next generation microlithography. An atomic model is developed based on the atomic data calculated by Hullac code, which is validated through detailed comparisons with experimental emission and a absorption spectra. The atomic model is improved with respect to the wavelength of the strong emission lines, and the number of satellite channels taken into account. As a result, the radiation hydrodynamics model is shown to successfully reproduce the experiments. We show Sn plasma is more efficient than Xe plasma because of the atomic number dependence of the emission wavelength, and the use of CO$$_{2}$$ lasers as a pumping source has an advantage to reduce satellite contribution and to have narrower emission spectrum to obtain higher conversion efficiency.

Journal Articles

Atomic processes in the LPP and LA-DPP EUV sources

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Alternative Lithographic Technologies (Proceedings of SPIE Vol.7271), p.727130_1 - 727130_8, 2009/03

We investigate characteristic feature of the atomic radiation from tin plasmas, which allow one to obtain high power EUV emission efficiently. We develop a collisional radiative model of tin ions to calculate steady-state and time dependent ion abundance, level population, and coefficients of radiative transfer of the plasma. The model, which is based atomic data calculated using the Hullac code is refined both theoretically and experimentally. Calculation of the spectral emissivity and opacity are carried out over a wide range of plasma density and temperature, and pumping conditions to obtain high conversion efficiency are discussed.

Journal Articles

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

Nishihara, Katsunobu*; Sunahara, Atsushi*; Sasaki, Akira; Nunami, Masanori*; Tanuma, Hajime*; Fujioka, Shinsuke*; Shimada, Yoshinori*; Fujima, Kazumi*; Furukawa, Hiroyuki*; Kato, Takako*; et al.

Physics of Plasmas, 15(5), p.056708_1 - 056708_11, 2008/00

 Times Cited Count:122 Percentile:97.47(Physics, Fluids & Plasmas)

Journal Articles

${it In situ}$ hydraulic tests in the active fault survey tunnel, Kamioka mine, excavated through the active Mozumi-Sukenobe fault zone and their hydrogeological significance

Nohara, Tsuyoshi; Tanaka, Hidemi*; Watanabe, Kunio*; Furukawa, Noboru*; Takami, Akira*

Island Arc, 15(4), p.537 - 545, 2006/12

 Times Cited Count:4 Percentile:13.54(Geosciences, Multidisciplinary)

The spatial hydrogeological and structural character of the active Mozumi-Sukenobu Fault (MSF) was investigated along a survey tunnel excavated through the MSF in the Kamioka Mine, Central Japan. Major groundwater conduits on both sides of the MSF are recognized. One is considered to be a sub-vertical conduit between the tunnel and the surface, the other is estimated to be a major reservoir of old meteoric water alongside the MSF. Studies indicate that part of the MSF is a sub-vertical continuous barrier that obstructs younger meteoric water observed in the southeastern part of the Active Fault Survey Tunnel (AFST) and recharge to the rock mass intersected by the northwestern part of the AFST. It is considered that the MSF is a continuous barrier resulting in the storage of a large quantity of older groundwater to the northwest. The observations indicate that the major reservoir is not the fault breccia associated with the NE-SW oriented faults of the MSF. Rather, the reservoir is considered to be the zone in which blocks of fractured rocks occur beside high angle faults corresponding to X shears that coincide in orientation with the present-day regional stress field and antithetic Riedel shears of the MSF. It is considered that secondary porosity is developed in the major reservoir by the destruction of filling minerals and fracture development beside these shears. The results of borehole investigations in the AFST indicate that increase in hydraulic conductivity is not directly related to increased density of fractures around the MSF. Our results suggested that minor conduits are sporadically distributed in the sedimentary rocks around the MSF in the AFST.

Journal Articles

Low-density tin targets for efficient extreme ultraviolet light emission from laser-produced plasmas

Okuno, Tomoharu*; Fujioka, Shinsuke*; Nishimura, Hiroaki*; Tao, Y.*; Nagai, Keiji*; Gu, Q.*; Ueda, Nobuyoshi*; Ando, Tsuyoshi*; Nishihara, Katsunobu*; Norimatsu, Takayoshi*; et al.

Applied Physics Letters, 88(16), p.161501_1 - 161501_3, 2006/04

 Times Cited Count:64 Percentile:87.53(Physics, Applied)

no abstracts in English

Journal Articles

Analysis of interaction between DNA and ${it Deinococcus radiodurans}$ PprA protein by Atomic force microscopy

Murakami, Masahiro*; Narumi, Issei; Sato, Katsuya*; Furukawa, Akira*; Hayata, Isamu*

Biochimica et Biophysica Acta; Proteins and Proteomics, 1764(1), p.20 - 23, 2006/01

 Times Cited Count:11 Percentile:22.04(Biochemistry & Molecular Biology)

A DNA repair-promoting protein, PprA, was isolated from a radiation resistant bacterium, ${it Deinococcus radiodurans}$. Despite several studies, however, the function of PprA is not still clear. We used atomic force microscopy (AFM) to elucidate the role of this protein in the DNA repair pathway. In the present study, interaction between the linear DNA and PprA protein was imaged and analyzed by AFM without any fixation or staining. Though both end-bound and internally bound PprA was observed, the affinity of the end-bound protein was greater considering the proportion of features of binding analyzed by AFM. In some conditions, looping forms of the DNA-PprA complex were observed. Gel filtration high performance liquid chromatography (HPLC) was also conducted to estimate the molecular weight of this protein. The result of the HPLC analysis suggested that PprA formed multimers in buffer solution without DNA.

Journal Articles

Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Sasaki, Akira; Nishihara, Katsunobu*; Murakami, Masakatsu*; Koike, Fumihiro*; Kagawa, Takashi*; Nishikawa, Takeshi*; Fujima, Kazumi*; Kawamura, Toru*; Furukawa, Hiroyuki*

Applied Physics Letters, 85(24), p.5857 - 5859, 2004/12

 Times Cited Count:43 Percentile:79.97(Physics, Applied)

no abstracts in English

JAEA Reports

Feasibility Study on Commercialization of Fast Breeder Reactor Cycle Systems Interim Report of Phase II; Technical Study Report for Reactor Plant Systems

Konomura, Mamoru; Ogawa, Takashi; Okano, Yasushi; Yamaguchi, Hiroyuki; Murakami, Tsutomu; Takaki, Naoyuki; Nishiguchi, Youhei; Sugino, Kazuteru; Naganuma, Masayuki; Hishida, Masahiko; et al.

JNC TN9400 2004-035, 2071 Pages, 2004/06

JNC-TN9400-2004-035.pdf:76.42MB

The attractive concepts for Sodium-, lead-bismuth-, helium- and water-cooled FBRs have been created through using typical plant features and employing advanced technologies. Efforts on evaluating technological prospects of feasibility have been paid for these concepts. Also, it was comfirmed if these concepts satisfy design requierments of capability and performance presumed in the feasibilty study on commertialization of Fast Breeder Reactor Systems. As results, it was concluded that the selection of sodium-cooled reactor was most rational for practical use of FBR technologies in 2015.

Journal Articles

Theoretical simulation of extreme UV radiation source for lithography

Fujima, Kazumi*; Nishihara, Katsunobu*; Kawamura, Toru*; Furukawa, Hiroyuki*; Kagawa, Takashi*; Koike, Fumihiro*; More, R.*; Murakami, Masakatsu*; Nishikawa, Takeshi*; Sasaki, Akira; et al.

Emerging Lithographic Technologies VIII, Proceedings of SPIE Vol.5374, p.405 - 412, 2004/00

no abstracts in English

Journal Articles

Beamline for surface and interface structures at SPring-8

Sakata, Osami*; Furukawa, Yukito*; Goto, Shunji*; Mochizuki, Tetsuro*; Uruga, Tomoya*; Takeshita, Kunikazu*; Ohashi, Haruhiko*; Ohata, Toru*; Matsushita, Tomohiro*; Takahashi, Sunao*; et al.

Surface Review and Letters, 10(2&3), p.543 - 547, 2003/04

 Times Cited Count:142 Percentile:96.4(Chemistry, Physical)

The main components of a new beamline for surface and interface crystal structure determination at SPring-8 are briefly described. Stages for the beamline monochromator are modified for making an incident X-ray intensity more stable for surface X-ray experiments. Absolute photon flux densities were measured with an incident photon energy. A new ultrahigh vacuum system is introduced with preliminary X-ray measurements from an ordered oxygen on Pt(111) surface.

JAEA Reports

The 193rd Meeting of the Electrochemical Society, Inc.

Furukawa, Tomohiro; Yamaguchi, Akira

PNC TN9600 98-003, 47 Pages, 1998/05

PNC-TN9600-98-003.pdf:4.58MB

None

Oral presentation

ZnO as fast scintillation devices for the next generation lithography evaluated with Ni-like Ag laser

Furukawa, Yusuke*; Murakami, Hidetoshi*; Sarukura, Nobuhiko*; Tanaka, Momoko; Nishikino, Masaharu; Nagashima, Keisuke; Kimura, Toyoaki; Yamatani, Hiroshi; Yoshikawa, Akira*; Fukuda, Tsuguo*

no journal, , 

Using Ni-like Ag extreme ultraviolet (EUV) laser operated at 13.9-nm, ZnO is shown to be the excellent scintillator in this wavelength region with sufficiently short response time of less than 3 nsec and prominent peak fluorescence originated form exciton at 380 nm.

Oral presentation

ZnO as fast EUV scintillator for the next generation lithography

Tanaka, Momoko; Furukawa, Yusuke*; Murakami, Hidetoshi*; Sarukura, Nobuhiko*; Nishikino, Masaharu; Nagashima, Keisuke; Kimura, Toyoaki; Yamatani, Hiroshi; Yoshikawa, Akira*; Fukuda, Tsuguo*

no journal, , 

Using Ni-like Ag extreme ultraviolet (EUV) laser operated at 13.9-nm, ZnO is shown to be the excellent scintillator in this wavelength region with sufficiently short response time of less than 3 nsec and prominent peak fluorescence originated form exciton at 380 nm.

Oral presentation

Photoluminescence of ZnO by EUV laser

Furukawa, Yusuke*; Murakami, Hidetoshi*; Saito, Shigeki*; Sarukura, Nobuhiko*; Nishimura, Hiroaki*; Mima, Kunioki*; Tanaka, Momoko; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; et al.

no journal, , 

Zinc oxide (ZnO) has previously been reported to be a potential light-emitting diode materia. We measured the time-resolved emission spectrum of a ZnO crystal for extreme ultraviolet (EUV) laser excitation at 13.9 nm wavelength and compared with UV excitation case. The emission lifetime was determined to be 2.6 ns. This value was not changed even for ultraviolet laser excitation. In the context of the nanosecond regime in the EUV region, ZnO crystal promises to be a feasible scintillation material.

33 (Records 1-20 displayed on this page)