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Journal Articles

Electrically insulated MLI and thermal anchor

Kamiya, Koji; Furukawa, Masato; Hatakenaka, Ryuta*; Miyakita, Takeshi*; Murakami, Haruyuki; Kizu, Kaname; Tsuchiya, Katsuhiko; Koide, Yoshihiko; Yoshida, Kiyoshi

AIP Conference Proceedings 1573, p.455 - 462, 2014/01

 Times Cited Count:5 Percentile:90.7

The thermal shield of JT-60SA is kept at 80 K and will use the Multi Layered Insulator (MLI) to reduce radiation heat load to the superconducting coils at 4.4 K from the cryostat at 300 K. Due to plasma pulse operation, the MLI is affected by eddy current in toroidal direction. The MLI is designed to suppress the current by electrically insulating every 20 degree in the toroidal direction by covering the MLI with polyimide films. In this paper, two kinds of designs for insulated MLI are proposed focusing on a way to overlap MLI. A boil-off calorimeter method and temperature measurement has been performed to determine the thermal performance of MLI. The design of electrical insulated thermal anchor between the toroidal field (TF) coil and the thermal shield is also explained.

Journal Articles

Development of a resonant laser ionization gas cell for high-energy, short-lived nuclei

Sonoda, Tetsu*; Wada, Michiharu*; Tomita, Hideki*; Sakamoto, Chika*; Takatsuka, Takaaki*; Furukawa, Takeshi*; Iimura, Hideki; Ito, Yuta*; Kubo, Toshiyuki*; Matsuo, Yukari*; et al.

Nuclear Instruments and Methods in Physics Research B, 295, p.1 - 10, 2013/01

 Times Cited Count:20 Percentile:83.94(Instruments & Instrumentation)

no abstracts in English

Journal Articles

Development of the minimally invasive laser therapy for endometrial lesions

Shigetomi, Hiroshi*; Oka, Kiyoshi; Oi, Hidekazu*; Furukawa, Naoto*; Yoshida, Shozo*; Kawaguchi, Ryuji*; Nagai, Akira*; Haruta, Shoji*; Yanase, Yasuhito*; Akasaka, Julia*; et al.

Nihon Reza Igakkai-Shi, 33(2), p.131 - 135, 2012/08

no abstracts in English

Journal Articles

Modeling of atomic processes of multiple charged ions in plasmas and its application to the study of EUV light sources

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Plasma and Fusion Research (Internet), 6(Sp.1), p.2401145_1 - 2401145_4, 2011/12

Atomic processes and radiation from multiple charged ions in plasmas are of the interest in the investigation of plasma wall interaction and transport of impurity ions in the fusion devices. The emission from multiple charged ions is also investigated for the development of extreme ultra violet light (EUVL) sources at $$lambda=13.5 nm$$. Efficient emission through the 4d-4f + 4p-4d transition array is obtained from tin ions. An optimization of pumping conditions of laser produced plasma sources is carried out theoretically and experimentally. We also investigate an extension of the plasma light sources to short wavelength to $$lambda=6.5 nm$$ using Gd and Tb plasmas. We discuss requirements to the atomic structure, rate coefficient and collisional radiative codes to determine ion abundance and level population as a function of plasma temperature and density, to calculate the radiation intensity as well as emission spectrum.

Journal Articles

Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Applied Physics Letters, 97(23), p.231501_1 - 231501_3, 2010/12

 Times Cited Count:15 Percentile:52.76(Physics, Applied)

Emission spectrum and conversion efficiency of laser produced terbium plasmas are investigated theoretically on the basis of computational atomic data. It is shown that calculation reproduces the main peak of the experimental spectrum at $$lambda=6.5$$nm, which originates from 4$$d$$-4$$f$$ transitions of near palladium like ions (Tb$$^{19+}$$). Simple model of the isothermal expansion of plasma suggests that efficient emission can be obtained by pumping a plasma with a laser pulse with an intensity approximately one order of magnitude grater than in the case of tin sources at $$lambda=13.5$$nm.

Journal Articles

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

Sasaki, Akira; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishihara, Katsunobu*; Fujioka, Shinsuke*; Nishikawa, Takeshi*; Koike, Fumihiro*; Ohashi, Hayato*; Tanuma, Hajime*

Journal of Applied Physics, 107(11), p.113303_1 - 113303_11, 2010/06

 Times Cited Count:38 Percentile:81.45(Physics, Applied)

Atomic processes in Sn plasmas are investigated for application to extreme-ultraviolet (EUV) light sources used in microlithography. An atomic model of Sn is developed on the basis of calculated atomic data using the Hebrew University Lawrence Livermore Atomic Code (HULLAC). Resonance and satellite lines from singly and multiply excited states of Sn ions are identified. The wavelengths of the 4$$d$$-4$$f$$ + 4$$p$$-4$$d$$ transitions of Sn$$^{5+}$$ to Sn$$^{13+}$$ are investigated. Results of calculation are compared with those of the charge exchange spectroscopy, measurement of the emission spectrum of the laser produced plasma EUV source, and the opacity measurement of a radiatively heated Sn sample. A reasonable agreement is observed between calculated and experimental EUV emission spectra. The spectral emissivity and opacity of Sn plasmas are calculated using a full collisional radiative (CR) model as a function of electron temperature and ion density.

Journal Articles

Recent progress in the energy recovery linac project in Japan

Sakanaka, Shogo*; Akemoto, Mitsuo*; Aoto, Tomohiro*; Arakawa, Dai*; Asaoka, Seiji*; Enomoto, Atsushi*; Fukuda, Shigeki*; Furukawa, Kazuro*; Furuya, Takaaki*; Haga, Kaiichi*; et al.

Proceedings of 1st International Particle Accelerator Conference (IPAC '10) (Internet), p.2338 - 2340, 2010/05

Future synchrotron light source using a 5-GeV energy recovery linac (ERL) is under proposal by our Japanese collaboration team, and we are conducting R&D efforts for that. We are developing high-brightness DC photocathode guns, two types of cryomodules for both injector and main superconducting (SC) linacs, and 1.3 GHz high CW-power RF sources. We are also constructing the Compact ERL (cERL) for demonstrating the recirculation of low-emittance, high-current beams using above-mentioned critical technologies.

Journal Articles

Study of ion-beam-induced damage and luminescence properties in terbium-implanted AlGaN

Park, J.-H.*; Wakahara, Akihiro*; Okada, Hiroshi*; Furukawa, Yuzo*; Kim, Y.-T.*; Chang, H.-J.*; Song, J.*; Shin, S.*; Lee, J.-H.*; Sato, Shinichiro; et al.

Japanese Journal of Applied Physics, 49(3), p.032401_1 - 032401_5, 2010/03

 Times Cited Count:1 Percentile:5.53(Physics, Applied)

Journal Articles

Atomic modeling of the plasma EUV sources

Sasaki, Akira; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishihara, Katsunobu*; Nishikawa, Takeshi*; Koike, Fumihiro*; Tanuma, Hajime*

High Energy Density Physics, 5(3), p.147 - 151, 2009/09

 Times Cited Count:11 Percentile:39.93(Physics, Fluids & Plasmas)

We study the radiative properties of the EUV source to address conditions to achieve an output power and efficiency required for its application to the next generation microlithography. An atomic model is developed based on the atomic data calculated by Hullac code, which is validated through detailed comparisons with experimental emission and a absorption spectra. The atomic model is improved with respect to the wavelength of the strong emission lines, and the number of satellite channels taken into account. As a result, the radiation hydrodynamics model is shown to successfully reproduce the experiments. We show Sn plasma is more efficient than Xe plasma because of the atomic number dependence of the emission wavelength, and the use of CO$$_{2}$$ lasers as a pumping source has an advantage to reduce satellite contribution and to have narrower emission spectrum to obtain higher conversion efficiency.

Journal Articles

Light emitting FET based-on spatially selective doping of Eu in AlGaN/GaN HEMT

Okada, Hiroshi*; Takemoto, Kazumasa*; Oikawa, Fumitake*; Furukawa, Yuzo*; Wakahara, Akihiro*; Sato, Shinichiro; Oshima, Takeshi

Physica Status Solidi (C), 6(Suppl.2), p.S631 - S634, 2009/05

Light emitting field effect transistor (FET) based-on AlGaN/GaN high electron mobility transistor (HEMT) structure with spatially selective doping of rare-earth ions (REIs) as a luminescence center in the channel is proposed and investigated. Fabricated device showed excellent I-V characteristics as a transistor with gate control. By applying a drain bias of 20 V, red emission suggesting a luminescence from Eu ion was clearly observed. Applying a negative bias to the Schottky gate decreased the luminescence intensity.

Journal Articles

Atomic processes in the LPP and LA-DPP EUV sources

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

Alternative Lithographic Technologies (Proceedings of SPIE Vol.7271), p.727130_1 - 727130_8, 2009/03

We investigate characteristic feature of the atomic radiation from tin plasmas, which allow one to obtain high power EUV emission efficiently. We develop a collisional radiative model of tin ions to calculate steady-state and time dependent ion abundance, level population, and coefficients of radiative transfer of the plasma. The model, which is based atomic data calculated using the Hullac code is refined both theoretically and experimentally. Calculation of the spectral emissivity and opacity are carried out over a wide range of plasma density and temperature, and pumping conditions to obtain high conversion efficiency are discussed.

Journal Articles

Progress in R&D efforts on the energy recovery linac in Japan

Sakanaka, Shogo*; Ago, Tomonori*; Enomoto, Atsushi*; Fukuda, Shigeki*; Furukawa, Kazuro*; Furuya, Takaaki*; Haga, Kaiichi*; Harada, Kentaro*; Hiramatsu, Shigenori*; Honda, Toru*; et al.

Proceedings of 11th European Particle Accelerator Conference (EPAC '08) (CD-ROM), p.205 - 207, 2008/06

Future synchrotron light sources based on the energy-recovery linacs (ERLs) are expected to be capable of producing super-brilliant and/or ultra-short pulses of synchrotron radiation. Our Japanese collaboration team is making efforts for realizing an ERL-based hard X-ray source. We report recent progress in our R&D efforts.

Journal Articles

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

Nishihara, Katsunobu*; Sunahara, Atsushi*; Sasaki, Akira; Nunami, Masanori*; Tanuma, Hajime*; Fujioka, Shinsuke*; Shimada, Yoshinori*; Fujima, Kazumi*; Furukawa, Hiroyuki*; Kato, Takako*; et al.

Physics of Plasmas, 15(5), p.056708_1 - 056708_11, 2008/00

 Times Cited Count:116 Percentile:97.42(Physics, Fluids & Plasmas)

Journal Articles

A New measurement of the astrophysical $$^8$$Li($$alpha$$, n)$$^{11}$$B reaction

Ishiyama, Hironobu*; Hashimoto, Takashi; Ishikawa, Tomoko*; Watanabe, Yutaka*; Das, S. K.*; Miyatake, Hiroari; Mizoi, Yutaka*; Fukuda, Tomokazu*; Tanaka, Masahiko*; Fuchi, Yoshihide*; et al.

Physics Letters B, 640(3), p.82 - 85, 2006/09

 Times Cited Count:32 Percentile:85.01(Astronomy & Astrophysics)

The excitation function of the $$^{8}$$Li($$alpha$$,n)$$^{11}$$B reaction was measured while identifying the final state event by event in the region of E$$_{rm{cm}}$$ = 0.7 - 2.6 MeV using a highly efficient detector system and a low-energy $$^8$$Li beam. The results are much improved both in statistics and precisions, and show smaller cross sections than those of previous measurements by a factor of more than 2 in the low-energy region of E$$_{rm{cm}}le$$ 1.5 MeV. A resonance-like structure is found at around E$$_{rm{cm}}$$ = 0.85 MeV.

Journal Articles

A New measurement of the $$^8$$Li($$alpha$$,n)$$^{11}$$B reaction for astrophysical interest

Das, S. K.*; Fukuda, Tomokazu*; Mizoi, Yutaka*; Ishiyama, Hironobu*; Miyatake, Hiroari*; Watanabe, Yutaka*; Hirayama, Yoshikazu*; Tanaka, Masahiko*; Yoshikawa, Nobuharu*; Jeong, S.-C.*; et al.

AIP Conference Proceedings 847, p.374 - 376, 2006/07

no abstracts in English

Journal Articles

Gated multiple-sampling and tracking proportional chamber; New detector system for nuclear astrophysical study with radioactive nuclear beams

Hashimoto, Takashi; Ishiyama, Hironobu*; Ishikawa, Tomoko*; Kawamura, Takashi*; Nakai, Koji*; Watanabe, Yutaka*; Miyatake, Hiroari; Tanaka, Masahiko*; Fuchi, Yoshihide*; Yoshikawa, Nobuharu*; et al.

Nuclear Instruments and Methods in Physics Research A, 556(1), p.339 - 349, 2006/01

 Times Cited Count:32 Percentile:89.13(Instruments & Instrumentation)

A new type of three dimensional tracking and proportional gas counter has been developed. Adopting a gating-grid system, performance of the detector becomes stable under the injection rate of charged particles less than 4$$times$$10$$^4$$ pps. It is a useful detection system for astrophysical experiments using radioactive nuclear beams, since the efficiency is so high as 100 %.

Journal Articles

Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Sasaki, Akira; Nishihara, Katsunobu*; Murakami, Masakatsu*; Koike, Fumihiro*; Kagawa, Takashi*; Nishikawa, Takeshi*; Fujima, Kazumi*; Kawamura, Toru*; Furukawa, Hiroyuki*

Applied Physics Letters, 85(24), p.5857 - 5859, 2004/12

 Times Cited Count:42 Percentile:80.07(Physics, Applied)

no abstracts in English

JAEA Reports

Feasibility Study on Commercialization of Fast Breeder Reactor Cycle Systems Interim Report of Phase II; Technical Study Report for Reactor Plant Systems

Konomura, Mamoru; Ogawa, Takashi; Okano, Yasushi; Yamaguchi, Hiroyuki; Murakami, Tsutomu; Takaki, Naoyuki; Nishiguchi, Youhei; Sugino, Kazuteru; Naganuma, Masayuki; Hishida, Masahiko; et al.

JNC TN9400 2004-035, 2071 Pages, 2004/06

JNC-TN9400-2004-035.pdf:76.42MB

The attractive concepts for Sodium-, lead-bismuth-, helium- and water-cooled FBRs have been created through using typical plant features and employing advanced technologies. Efforts on evaluating technological prospects of feasibility have been paid for these concepts. Also, it was comfirmed if these concepts satisfy design requierments of capability and performance presumed in the feasibilty study on commertialization of Fast Breeder Reactor Systems. As results, it was concluded that the selection of sodium-cooled reactor was most rational for practical use of FBR technologies in 2015.

Journal Articles

Theoretical simulation of extreme UV radiation source for lithography

Fujima, Kazumi*; Nishihara, Katsunobu*; Kawamura, Toru*; Furukawa, Hiroyuki*; Kagawa, Takashi*; Koike, Fumihiro*; More, R.*; Murakami, Masakatsu*; Nishikawa, Takeshi*; Sasaki, Akira; et al.

Emerging Lithographic Technologies VIII, Proceedings of SPIE Vol.5374, p.405 - 412, 2004/00

no abstracts in English

Journal Articles

Beamline for surface and interface structures at SPring-8

Sakata, Osami*; Furukawa, Yukito*; Goto, Shunji*; Mochizuki, Tetsuro*; Uruga, Tomoya*; Takeshita, Kunikazu*; Ohashi, Haruhiko*; Ohata, Toru*; Matsushita, Tomohiro*; Takahashi, Sunao*; et al.

Surface Review and Letters, 10(2&3), p.543 - 547, 2003/04

 Times Cited Count:140 Percentile:96.39(Chemistry, Physical)

The main components of a new beamline for surface and interface crystal structure determination at SPring-8 are briefly described. Stages for the beamline monochromator are modified for making an incident X-ray intensity more stable for surface X-ray experiments. Absolute photon flux densities were measured with an incident photon energy. A new ultrahigh vacuum system is introduced with preliminary X-ray measurements from an ordered oxygen on Pt(111) surface.

43 (Records 1-20 displayed on this page)