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Journal Articles

Study on depth profile of heavy ion irradiation effects in poly(tetrafluoroethylene-co-ethylene)

Gowa, Tomoko*; Shiotsu, Tomoyuki*; Urakawa, Tatsuya*; Oka, Toshitaka; Murakami, Takeshi*; Oshima, Akihiro*; Hama, Yoshimasa*; Washio, Masakazu*

Radiation Physics and Chemistry, 80(2), p.264 - 267, 2011/02

 Times Cited Count:11 Percentile:58.21(Chemistry, Physical)

High linear energy transfer (LET) heavy ion beams were irradiated to poly(tetrafluoroethylene-co-ethylene) (ETFE) under vacuum and in air. The irradiation effects in ETFE as a function of the depth was precisely evaluated by analyzing each one of the films of the irradiation samples which were made of stacked ETFE films. It was indicated that conjugated double bonds would be generated by heavy ion beam irradiation, and their amounts should show the Bragg-curve-like distributions. Also, it was suggested that higher LET beams would induce radical formation in high density and longer conjugated C=C double bonds could be generated by the second-order reactions. Moreover, for irradiation samples in air, C=O was produced correlating to the yield of oxygen molecules diffusing from the sample surface.

Journal Articles

Micro-fabrication of biodegradable polymers using focused ion beam

Okubo, Satoshi*; Takahashi, Tomohiro*; Takasawa, Yuya*; Gowa, Tomoko*; Sasaki, Takashi*; Nagasawa, Naotsugu; Tamada, Masao; Oshima, Akihiro*; Tagawa, Seiichi*; Washio, Masakazu*

Journal of Photopolymer Science and Technology, 23(3), p.393 - 397, 2010/11

 Times Cited Count:4 Percentile:13.15(Polymer Science)

Microfabrication of biodegradable polymers such as poly(butylene succinate-${it co}$-adipate) (PBSA) and poly($$varepsilon$$-caprolactone) (PCL) were demonstrated using focused ion beam (FIB) with maskless direct etching. As the result, the micro structures of PBSA and PCL were obtained. The etching depth of both PBSA and PCL were increased with increasing FIB fluence, and the etching rates were estimated to be about 1.3 $$times$$ 10$$^{-18}$$ $$mu$$m/(ions cm$$^{-2}$$) and 1.2 $$times$$ 10$$^{-18}$$ $$mu$$m/(ions cm$$^{-2}$$), respectively. Moreover, very thin films of PBSA and PCL were made by spin-coating method. The thicknesses of the spin-coated samples were about 200 nm, and the surface roughness was less than 10 nm (RMS). The fine structures such as micro-gear of PBSA and PCL were obtained without solid debris. The line width of the fabricated structure was about 250 nm.

Journal Articles

Ion beam irradiation effects on resist materials

Gowa, Tomoko*; Takahashi, Tomohiro*; Oka, Toshitaka; Murakami, Takeshi*; Oshima, Akihiro*; Tagawa, Seiichi*; Washio, Masakazu*

Journal of Photopolymer Science and Technology, 23(3), p.399 - 404, 2010/08

Oral presentation

Fabrication of functionally gradient PEM using heavy ion beams grafting

Washio, Masakazu*; Shiraki, Fumiya*; Oshima, Yuji*; Takasawa, Yuya*; Fujita, Hajime*; Gowa, Tomoko*; Kudo, Hisaaki*; Oka, Toshitaka; Hama, Yoshimasa*; Murakami, Takeshi*; et al.

no journal, , 

no abstracts in English

Oral presentation

Development of functionally-graded materials using high energy heavy ion beam

Oshima, Akihiro*; Shiraki, Fumiya*; Takasawa, Yuya*; Fujita, Hajime*; Yoshikawa, Taeko*; Tatsumi, Takahiro*; Tsubokura, Hidehiro*; Takahashi, Tomohiro*; Gowa, Tomoko*; Sakaue, Kazuyuki*; et al.

no journal, , 

no abstracts in English

Oral presentation

Study on direct etching of fluoropolymers by heavy ion beam irradiation

Takasawa, Yuya*; Fukutake, Naoyuki*; Takahashi, Tomohiro*; Urakawa, Tatsuya*; Oshima, Yuji*; Gowa, Tomoko*; Shiraki, Fumiya*; Fujita, Hajime*; Oka, Toshitaka; Murakami, Takeshi*; et al.

no journal, , 

Oral presentation

Study on depth profile of heavy ion irradiation effects in poly(tetrafluoroethylene-co-ethylene)

Gowa, Tomoko*; Shiotsu, Tomoyuki*; Urakawa, Tatsuya*; Oka, Toshitaka; Murakami, Takeshi*; Oshima, Akihiro*; Hama, Yoshimasa*; Washio, Masakazu*

no journal, , 

7 (Records 1-7 displayed on this page)
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