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-lactic acid) using focused ion beam direct etchingOyama, Tomoko; Hinata, Toru*; Nagasawa, Naotsugu; Oshima, Akihiro*; Washio, Masakazu*; Tagawa, Seiichi*; Taguchi, Mitsumasa
Applied Physics Letters, 103(16), p.163105_1 - 163105_4, 2013/10
Times Cited Count：11 Percentile：44.13(Physics, Applied)Micro/nanofabrication of biocompatible and biodegradable poly(-lactic acid) (PLLA) was evaluated using focused Ga ion beam direct etching. The fabrication performance was determined with different ion fluences and fluxes. It was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat because the resistance of PLLA to thermal deformation is decreased when above its glass transition temperature (approximately 60
C). By controlling the irradiation conditions, controlled micro/nanostructures of PLLA were fabricated, such as holes (
80 nm) and alphabets (width: 100 nm). Moreover, focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds expected to have good cell attachment properties.
Kobayashi, Akinobu*; Hinata, Toru*; Okubo, Satoshi*; Oyama, Tomoko; Nagasawa, Naotsugu; Taguchi, Mitsumasa; Oshima, Akihiro*; Tagawa, Seiichi*; Washio, Masakazu*
no journal, ,
In this study, a Si mold used for micro/nano fabrication of polytetrafluoroethylene (PTFE) via Thermal and Radiation process for Fabricationprocess (TRaf process) was investigated with X-ray photoelectron spectroscopy. It was found that the surface of Si mold was fluorinated by TRaf process. This fluorinated Si mold was applied for nanoimprint lithography (NIL) of high adhesion material without release agent. As a result, NIL of poly(
-caprolactone) was successfully performed.
Oyama, Tomoko; Hinata, Toru*; Nagasawa, Naotsugu; Oshima, Akihiro*; Washio, Masakazu*; Tagawa, Seiichi*; Taguchi, Mitsumasa
no journal, ,
Micro/nanofabrication of biocompatible and biodegradable poly(L-lactic acid) (PLLA) using quantum beams was evaluated for future bio-device applications. Electron beam nanoimprint lithography was proposed for fabricating micro/nanostructures of radiation-crosslinked-PLLA which has high thermal stability. Also, focused ion beam direct etching enabled controlled micro/nanofabrication of PLLA with C=C bond-rich surfaces which is expected to have good cell attachment properties.
