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論文

JAEA-AMS-TONOの現状(令和4年度)

藤田 奈津子; 三宅 正恭; 松原 章浩*; 石井 正博*; 渡邊 隆広; 神野 智史; 西尾 智博*; 小川 由美; 山本 悠介; 木村 健二; et al.

第23回AMSシンポジウム報告集, p.1 - 4, 2022/12

日本原子力研究開発機構東濃地科学センター土岐地球年代学研究所には加速器質量分析装置(AMS)が3台あり、実試料測定用に2台、炭素-14測定用超小型AMSの開発に向けた試験装置が1台ある。JAEA-AMS-TONO-5MVではルーチン測定をしている4核種に加えて、地下水の年代測定に有用な塩素-36の測定に向けた技術開発や硫黄除去方法の検討を実施している。炭素-14測定用超小型AMSは、イオンチャネリングを利用したAMSの同質量分子の分別を実施するための装置であり、2022年度中の炭素-14測定を目指して実証試験中である。またAMSで測定を行うための試料前処理の研究開発として、炭素-14測定における微少量試料の前処理法やその測定方法の検討、塩素-36測定のための前処理方法の検討などを実施している。発表では、それぞれの研究開発状況を報告する。

論文

Partial breakdown of translation symmetry at a structural quantum critical point associated with a ferroelectric soft mode

石井 悠衣*; 山本 有梨沙*; 佐藤 直大*; 南部 雄亮*; 河村 聖子; 村井 直樹; 尾原 幸治*; 河口 彰吾*; 森 孝雄*; 森 茂生*

Physical Review B, 106(13), p.134111_1 - 134111_7, 2022/10

 被引用回数:0 パーセンタイル:0(Materials Science, Multidisciplinary)

We report that complete suppression of a phonon-driven structural phase transition causes partial breakdown of a three-dimensional translation symmetry in a well-defined sublattice. This state is revealed for a dielectric compound, Ba$$_{1-x}$$Sr$$_x$$Al$$_2$$O$$_4$$, that comprises an AlO$$_4$$ network incorporated into a hexagonal Ba(Sr) sublattice. Pair distribution function analyses and inelastic neutron scattering experiments provide clear-cut evidence of the AlO$$_4$$ network forming a continuum of Al-O short-range correlations similar to glasses, whereas the Ba(Sr) sublattice preserves the original translational symmetry. This glassy network significantly dampens the phonon spectrum and transforms it into the broad one resembling those typically observed in glass materials.

論文

Variation in fault hydraulic connectivity with depth in mudstone; An Analysis of poroelastic hydraulic response to excavation in the Horonobe URL

尾崎 裕介; 石井 英一; 菅原 健太郎*

Geomechanics for Energy and the Environment, 31, p.100311_1 - 100311_13, 2022/09

 被引用回数:3 パーセンタイル:52.76(Energy & Fuels)

本研究では、稚内層内部における水理力学的な亀裂の連結性を評価するために、幌延深地層研究センターにおける坑道掘削時の水圧応答データの解析を行った。解析対象とした観測データは、水理力学連成挙動であるMandel-Cryer効果の影響を顕著に受けており、この影響を考慮した水圧応答データの解析を行うために水理力学連成挙動を考慮した数値シミュレーションを実施した。シミュレーション結果に基づいて有効透水係数を推定したところ、有効透水係数は深度400mから深度500mにかけて徐々に低下し、深度500m以深では健岩部相当の低透水性を有することが示された。また、解析解に基づいて観測データを分類したところ、稚内層内部において水理学的特性が異なる領域が存在することが示された。これらの結果より、水理学的亀裂の連結性は稚内層において、深度が深くなるにつれて急激に変化するのではなく数十メートルの幅で徐々に変化していることが示された。

論文

Structural phase transition in cobalt oxyfluoride Co$$_{3}$$Sb$$_{4}$$O$$_{6}$$F$$_{6}$$ observed by high-resolution synchrotron and neutron diffraction

下野 聖矢*; 石橋 広記*; 永吉 祐輔*; 池野 豪一*; 河口 彰吾*; 萩原 雅人; 鳥居 周輝*; 神山 崇*; 市橋 克哉*; 西原 禎文*; et al.

Journal of Physics and Chemistry of Solids, 163, p.110568_1 - 110568_7, 2022/04

 被引用回数:0 パーセンタイル:17.17(Chemistry, Multidisciplinary)

The structural phase transition from cubic ($$Ibar{4}3m$$) to a $$c > a$$ tetragonal ($$Ibar{4}$$) at $$T_{rm S}$$ $$sim$$ 180 K was found in non-centrosymmetric oxyfluoride Co$$_{3}$$Sb$$_{4}$$O$$_{6}$$F$$_{6}$$ by high-resolution neutron and synchrotron powder diffraction. To investigate this phase transition, specific heat, magnetization, and dielectric measurements were performed. Although the specific heat and dielectric constant showed anomalies at $$T_{rm S}$$, a phase transition to ferroelectricity was not observed in the polarization hysteresis loop down to 30 K. The rotation of the CoO$$_{2}$$F$$_{4}$$ octahedron was observed at $$T_{rm S}$$ from the structural analysis using synchrotron and neutron powder diffraction data. It was found that the magnetic phase transition from paramagnetic to G-type antiferromagnetic occurred at $$T_{rm N}$$ $$sim$$ 67 K, at which a peak was observed in the specific heat measurements, via magnetic structure analysis using neutron powder diffraction data. The magnetic moments of Co$$^{2+}$$ were aligned along the tetragonal $$c$$-axis direction with a Co$$^{2+}$$ moment of 2.80(1) $$mu_{rm B}$$ at 13 K.

論文

Space weather benchmarks on Japanese society

石井 守*; 塩田 大幸*; 垰 千尋*; 海老原 祐輔*; 藤原 均*; 石井 貴子*; 一本 潔*; 片岡 龍峰*; 古賀 清一*; 久保 勇樹*; et al.

Earth, Planets and Space (Internet), 73(1), p.108_1 - 108_20, 2021/12

 被引用回数:4 パーセンタイル:59.06(Geosciences, Multidisciplinary)

科研費新学術領域研究・太陽地球圏環境予測(PSTEP)の一環として、日本における宇宙天気災害の発生規模と頻度の関係を包括的に調査した。調査した情報は、国内における宇宙天気ユーザーが理解できる形で公開した。本論文では、その包括的調査の結果をまとめるとともに、宇宙天気災害が電力や航空業界に与える経済的損失に関して定量評価した結果も紹介する。

論文

PSTEP: Project for solar-terrestrial environment prediction

草野 完也*; 一本 潔*; 石井 守*; 三好 由純*; 余田 成男*; 秋吉 英治*; 浅井 歩*; 海老原 祐輔*; 藤原 均*; 後藤 忠徳*; et al.

Earth, Planets and Space (Internet), 73(1), p.159_1 - 159_29, 2021/12

 被引用回数:6 パーセンタイル:52.8(Geosciences, Multidisciplinary)

PSTEPとは、2015年4月から2020年3月まで日本国内の太陽・地球惑星圏に携わる研究者が協力して実施した科研費新学術領域研究である。この研究枠組みから500以上の査読付き論文が発表され、様々なセミナーやサマースクールが実施された。本論文では、その成果をまとめて報告する。

論文

Poroelastic hydraulic-response of fractured mudstone to excavation in the Horonobe URL; As an indicator of fracture hydraulic-disconnectivity

尾崎 裕介; 石井 英一; 菅原 健太郎*

Extended abstract of International Conference on Coupled Processes in Fractured Geological Media; Observation, Modeling, and Application (CouFrac 2020) (Internet), 4 Pages, 2020/11

本研究では、幌延深地層研究センター周辺の地下深部に存在が推定されている低透水性領域の存在の検証を目的として、坑道掘削に伴うHDB-6号孔の水圧変動の再現解析を行った。地下深部では亀裂の水理的連結性が乏しいために健岩部相当の透水性が推定されている一方で、浅部においては水理学的亀裂の連結性が高いため透水性が健岩部よりも高い水理地質構造が推定されている。水理-力学連成挙動を考慮したシミュレーションを実施したところ、観測されている水圧データには水理-力学連成挙動の影響であるMandel-Cryer効果の影響を受けていること、この効果が数年単位で継続するためには深部の透水性が健岩部相当に低いことが必要であることが確認された。これらの結果より、数値シミュレーションにより、既往研究により存在が予測されていた地下深部における健岩部相当の低透水領域の存在が検証された。

論文

Study on source of radioactive material in primary coolant of HTTR

石井 俊晃; 島崎 洋祐; 小野 正人; 藤原 佑輔; 石塚 悦男; 濱本 真平

Proceedings of 9th International Topical Meeting on High Temperature Reactor Technology (HTR 2018) (USB Flash Drive), 3 Pages, 2018/10

In the primary cooling system of the High-Temperature Engineering Test Reactor, the highest dose rate was observed at the Helium Gas Circulator filter areas. To find the origin of the radioactive material, the radiation dose rates, and $$gamma$$ ray spectrums were measured. From these results, it is clear that the main radioactive nuclide at the filter is $$^{60}$$Co after 6 years reactor shutdown, and the in-core materials are a low possibility as the candidates of radioactive materials. It is also clear that the mixtures of materials, the contained low-level impurities and other new candidate materials must be considered.

論文

Pressure-induced stacking disorder in boehmite

石井 優佑*; 小松 一生*; 中野 智志*; 町田 真一*; 服部 高典; 佐野 亜沙美; 鍵 裕之*

Physical Chemistry Chemical Physics, 20(24), p.16650 - 16656, 2018/06

 被引用回数:4 パーセンタイル:18.09(Chemistry, Physical)

その場シンクロトロンX線および中性子回折を用いて、アルミニウム層状水酸化物、ベーマイト($$gamma$$-AlOOH)の構造を圧力の関数として調べた。25GPa以上のX線回折パターンにおいてhkl(h$$neq$$0)ピークのみに見られるピーク広がりおよびその後の分裂は、a軸に沿ったAlO$$_{6}$$八面体層の連続的に増加する変位に伴う積層不整によって説明される。この知見は、連続的な層の変位によって駆動される圧力誘起積層不整の最初の実験結果である可能性がある。層の変位の大きさは、積層不規則構造モデルに基づくX線散乱プロファイル計算から推定された。重水素化されたサンプルの10GPaまでの中性子回折パターンの構造解析によって得られたベーマイトの水素結合ジオメトリーは、O-D共有結合およびD$$cdots$$O水素結合距離の線形的な接近を示し、26GPa未満でマージされる可能性がある。圧力誘起積層不整は、水素結合の静電ポテンシャルを非対称にし、プロトントンネリングの可能性を低下させる。

論文

Electroplating of Ni microstructures on the cross section of Cu wire using PMMA mother fabricated by proton beam writing

田邊 祐介*; 岩本 隆志*; 高橋 潤一*; 西川 宏之*; 佐藤 隆博; 石井 保行; 神谷 富裕

JAEA-Review 2012-046, JAEA Takasaki Annual Report 2011, P. 129, 2013/01

In this study, the Ni microstructures were attempted to be fabricated on a distal surface of Cu wires with a diameter of 1.0 mm aiming at the use for imprint lithography. Firstly a PMMA master block was fabricated on the distal surface by exposing PB with beam size of 1.1 $$mu$$m at 3.0 MeV and developing it by IPA-water for electroplating. The master block was composed of the 4-$$mu$$m wide lines with pitches of 25 $$mu$$m and depths of 20 $$mu$$m. Secondly the electroplating was performed on the PMMA master block using a nickel sulfamate bath. Thirdly the electroplated Ni surface was mechanically polished easily to remove PMMA by smoothing its surface. Finally, the Ni microstructures with 20.5 $$mu$$m were fabricated by removing the PMMA after polishing. We additionally performed UV imprint lithography of the photosensitive polymer using the Ni microstructures as a mold. The observation result of SEM images of Ni microstructures and UV imprinted grooves showed that their imprinted grooves were successfully transferred by way of the Ni microstructures from the PMMA master block using the combination of the electroplating and imprinting.

論文

Mach-Zehnder polymer waveguides fabricated using proton beam writing

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 桐生 弘武*; 小澤 優介*; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

JAEA-Review 2012-046, JAEA Takasaki Annual Report 2011, P. 126, 2013/01

In this study, a PMMA-based MZ waveguide was fabricated utilizing PBW to develop a thermo-optic switch. A 10-$$mu$$m-thick PMMA film was firstly spin-coated onto the 15 $$mu$$m SiO$$_2$$ film as the under cladding. Cores of a MZ waveguide with 8 $$mu$$m width were secondary drawn at the dose of 100 nC/mm$$^2$$ in the PMMA film using PBW with H$$^+$$ beam of the size of $$sim$$1.1 $$mu$$m and beam current of $$sim$$50 pA at 1.7 MeV. The MZ waveguide was drawn by symmetrically coupling two Y junctions and its branching angle was set to 2$$^circ$$ to reduce optical branching loss. Finally a 10-$$mu$$m-thick PMMA film was deposited again on the sample as an upper cladding by spin-coating. The mode-field diameter of near field patterns with about 10 $$mu$$m width was observed at $$lambda$$= 1.55 $$mu$$m on the basis of a fundamental mode without no higher-order modes which required to develop our objective MZ type thermo-optic switch for optical-fiber telecommunication. The result of the observation showed that the PMMA-based single-mode MZ waveguide for $$lambda$$= 1.55 $$mu$$m was successfully fabricated using PBW. As the next step to develop the optical switch, we will form a Ti thin-film heater and A$$ell$$ electrodes on the MZ waveguide using photolithography and wet-etching processes.

論文

Fabrication of Mach-Zehnder polimer waveguides by a direct-drawing technique using a focused proton beam

三浦 健太*; 佐藤 隆博; 石井 保行; 桐生 弘武*; 小澤 優介*; 江夏 昌志; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

Key Engineering Materials, 534, p.158 - 161, 2013/00

 被引用回数:5 パーセンタイル:89.92

We develop a thermo-optic switch of the Mach-Zehnder type polymer waveguide using proton beam writing (PBW). In this study, we succeeded in near field pattern Mach-Zehnder type single mode polymer waveguides at a wavelength of 1550 nm. The samples for the waveguides were composed with a 15-$$mu$$-thick under-cladding layer of SiO$$_2$$ deposited on a Si substrate using radio-frequency sputtering and a 10-$$mu$$m-thick PMMA film spin-coated onto the SiO$$_2$$ layer as a core layer. We wrote Mach-Zehnder type waveguides having a width of 8 $$mu$$m on the PMMA layer by PBW with a beam size of $$sim$$1 $$mu$$m and a beam current of 50 pA. After this writing, the 10-$$mu$$m-thick-PMMA layer was deposited again as an upper-cladding layer by spin-coating. In the observation of these waveguides, the light of laser of 1550-nm wavelength was injected into one side of the waveguide through a single-mode fiber. From the observation of the light emitted from the opposite side of the waveguides, near field patterns was observed using a vidicon camera with an optical microscope. The observation result demonstrated that the light traveled by single mode in the Mach-Zehnder type polymer waveguide. In the conference, we will report the development of the Mach-Zehnder type polymer waveguide in detail. In addition, the thermo-optic switch at the wavelength of 1550 nm by the Mach-Zehnder type polymer waveguide will also be briefly reported.

論文

Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

田邊 祐介*; 西川 宏之*; 佐藤 隆博; 石井 保行; 神谷 富裕

JAEA-Review 2011-043, JAEA Takasaki Annual Report 2010, P. 163, 2012/01

We report on Ni electroforming using high-aspect-ratio PMMA microstructures by Proton Beam Writing (PBW). There are several issues to be addressed in the fabrication process of Ni molds with a high-aspect-ratio using the PMMA microstructures. First, the residual PMMA was observed on the sidewall of PMMA master block by increasing the thickness of its master block. Second, the small voids were formed in the Ni molds when the high-aspect ratio PMMA master blocks were used. These problems ware resolved using the PMMA master blocks fabricated by PBW on the condition of the higher dose exposure than ordinal one and using a seed layer of a 600-$$mu$$m thick Cu substrate evaporated on the Si substrate before spin-coating the PMMA film. The 30-$$mu$$m PMMA master block with the aspect ratio of 30 was successfully fabricated using the above procedures. Using this PMMA master block, the Ni mold with 30-$$mu$$m thick on the Cu substrate was successfully electroformed without voids from the observation of the cross section revealed by a FIB. Furthermore, a Ni mold with grids and circle patterns was also successfully fabricated using a 15-$$mu$$m thick PMMA film spin-coated on a Cu substrate. The result of the thermal imprint using the Ni mold demonstrated that the high aspect structure was transferred on a PMMA film without damages of the Ni mold even after many trials.

論文

Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using focused proton beam

三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

Key Engineering Materials, 497, p.147 - 150, 2012/00

 被引用回数:7 パーセンタイル:95.17

Proton beam writing (PBW) is an attractive technique for next-generation micro-fabrication. We study the fabrication of optical waveguides of polymer materials using PBW. In this study, the optical waveguides of photorefractive polysilane "GLASSIA" was fabricated. The samples for the waveguides were prepared as follows; (1) An under-cladding layer of SiO$$_2$$ having a thickness of $$sim$$15 $$mu$$m was deposited on a Si substrate using radio-frequency sputtering. (2) A polysilane layer having a thickness of $$sim$$10 $$mu$$m was spin-coated onto the SiO$$_2$$ layer as a core layer. Optical waveguides were drawn by scanning a 1.7 MeV focused proton beam with $$sim$$1 $$mu$$m size and beam current of 50 pA which was produced by a submicron focused ion beam system connected with the 3 MV single-ended accelerator at JAEA. The drawing was carried out on the dose of 100, 200, 300 nC/mm$$^2$$ each. After the drawing, the sample surfaces were observed using an optical microscope and AFM. The observation result showed that the refractive index was changed and the cores of the waveguides were formed. We will report the details of above observation results in the conference. The change ratio of the refraction index will also be reported on the basis of the obtained result by inserting light ($$lambda$$ = 1.55 $$mu$$m) into the waveguide structure through a single-mode fiber.

論文

Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using focused proton beam

三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

Key Engineering Materials, 497, p.147 - 150, 2011/12

 被引用回数:6 パーセンタイル:2.48

Single mode straight waveguides for a wavelength of 1.55-$$mu$$m were, so far, fabricated using a proton beam writing (PBW) technique. We report the fabrication of Y-junction polymer waveguides with a polymethyl methacralate (PMMA) layers as the expansion of these straight waveguides using PBW in the conference. The PMMA layers consisted of an under-cladding layer of SiO$$_2$$ having a thickness of $$sim$$ 15-$$mu$$m deposited on an Si substrate, a PMMA layer having a thickness of $$sim$$ 10-$$mu$$m spin-coated onto the SiO$$_2$$ layer and a Y-junction waveguide with a width of 8-$$mu$$m in a PMMA core layer. The Y-junction waveguides with the angle of 2$$^{circ}$$ were drawn using the 1.7 MeV proton beam with 1-$$mu$$m in diameter and a beam current of 10 pA for a dose of 100 nC/mm$$^2$$. After spin-coating the PMMA layer with $$sim$$ 10-$$mu$$m thickness as an upper cladding on the irradiated PMMA layer, the near field pattern (NFP) of an 8-$$mu$$m-width Y-junction waveguide was observed using a tunable-wavelength laser. The observation showed that the fabrication of waveguide was succeeded because its waveguide was single mode and the intensity ratio between the two outputted lights was the almost same; 1:0.96. We also briefly report the next plans of the measurement of the refractive indices of proton-irradiated PMMA and SiO$$_2$$ films and the fabrication of a thermo-optic polymer switch based on a Mach-Zehnder interferometer waveguide.

論文

Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

田邊 祐介*; 西川 宏之*; 関 佳裕*; 佐藤 隆博; 石井 保行; 神谷 富裕; 渡辺 徹*; 関口 淳*

Microelectronic Engineering, 88(8), p.2145 - 2148, 2011/08

 被引用回数:9 パーセンタイル:47.41(Engineering, Electrical & Electronic)

Proton Beam Writing (PBW) is a direct-write technique using focused MeV proton beams. Electroforming Ni molds with high-aspect-ratio are developed for imprint lithography using master blocks of PMMA micro-structures fabricated by PBW. In this development, two problems happened as follows; the master blocks with unmelted PMMA remaining into the PMMA micro-structure in the etching process after PBW and the Ni molds with defectively transcriptional structures electroformed on the clear master blocks of its PMMA micro-structure. In this report, the two relations between the PMMA structures and the etching process and between their structures and the electroforming process were individually studied to solve the problems. In the conference, we will present the two problems, the several researches for their solutions and the trial production results of the electroforming Ni molds using the master blocks of the high-aspect-ratio PMMA micro-structures fabricated by PBW.

論文

Magnetic and dielectric study of R$$_{0.5}$$Sr$$_{0.5}$$MnO$$_{3}$$ (R = Gd, Tb and Dy)

吉井 賢資; 平光 雄介*; 岡島 由佳*; 米田 安宏; 西畑 保雄; 水木 純一郎; 中村 彰夫; 下条 豊; 石井 慶信*; 森井 幸生; et al.

Materials Research Bulletin, 45(11), p.1574 - 1580, 2010/10

 被引用回数:12 パーセンタイル:37.35(Materials Science, Multidisciplinary)

R$$_{0.5}$$Sr$$_{0.5}$$MnO$$_{3}$$ (R=Gd, Tb, Dy)の磁性と誘電性を調べた。磁気測定からは、すべての系において40K以下でスピングラス的な相が観測され、中性子散乱の結果と定性的に一致した。このグラス相の起源は、R$$^{3+}$$とSr$$^{3+}$$のサイズの違いによるランダムネス効果であると考えられる。誘電率測定からは、50Kから300Kの間で5000-10000程度の誘電率が観測され、誘電率はスピングラス転移温度付近でブロードなピークとなった。誘電分散の解析からは、誘電応答の乱雑性が見いだされ、磁性の結果同様、これはR/Srサイトのランダムネスに起因すると考えた。さらに、放射光測定の結果などから、この系の誘電応答はMn-3d電子に由来することが示唆された。

論文

Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing

椎根 康晴*; 西川 宏之*; 古田 祐介*; 金光 薫*; 佐藤 隆博; 石井 保行; 神谷 富裕; 中尾 亮太*; 内田 諭*

Microelectronic Engineering, 87(5-8), p.835 - 838, 2010/05

 被引用回数:7 パーセンタイル:42.54(Engineering, Electrical & Electronic)

Proton Beam Writing (PBW) is a direct writing process using a MeV focused proton beam. The previous performance examinations of the dielectrophoretic (DEP) devices, the high-aspect-ratio micro-structures with the pillar arrays and the fluidic channels fabricated by PBW, showed that spatially modulated electric fields were effective for trapping Escherichia coli. The reproduction of the DEP device using PBW only is, however, unsuitable because it takes a lot of time to fabricate complicated and large area structures. In this study, the fabrication technique of the micro fluidic channel, combining a soft lithography and PBW techniques, was introduced to improve the productivity of the DEP devices. The prototypes of DEP deceives including SU-8 high-aspect-ratio pillar arrays in the micro fluidic channel were developed using the fabrication technique. Especially the pillar arrays in these devices were produced by 1.0 or 1.7 MeV proton beams focused around 1 $$mu$$m in diameter. The observation of the DEP devices using an optical microscope image showed that the pillar arrays were successfully included in the micro fluidic channel. The prototyping capability of PBW combined with the soft lithography technique was highlighted by increasing the productivity of the DEP devices.

論文

Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA

神谷 富裕; 高野 勝昌; 石井 保行; 佐藤 隆博; 及川 将一*; 大久保 猛; 芳賀 潤二*; 西川 宏之*; 古田 祐介*; 打矢 直之*; et al.

Nuclear Instruments and Methods in Physics Research B, 267(12-13), p.2317 - 2320, 2009/06

 被引用回数:7 パーセンタイル:47.19(Instruments & Instrumentation)

In TIARA facility of Japan Atomic Energy Agency (JAEA) Takasaki, three-dimensional micro/nano structures with high aspect ratio based on cross linking process in negative resist such as SU-8 have been produced by a technique of mask less ion beam lithography. By bombarding high-energy heavy ions such as 450 MeV Xe$$^{23+}$$ to SU-8, a nanowire could be produced just with a single ion hitting. Then we tried to produce nanowires, of which both ends were fixed in the three-dimensional structure. This paper shows a preliminary experiment using a combination of 15 MeV Ni$$^{4+}$$ ion microbeam patterning and the 450 MeV $$^{129}$$Xe$$^{23+}$$ hitting on SU-8.

論文

Development of micromachining technology in ion microbeam system at TIARA, JAEA

神谷 富裕; 西川 宏之*; 佐藤 隆博; 芳賀 潤二; 及川 将一*; 石井 保行; 大久保 猛; 打矢 直之; 古田 祐介*

Applied Radiation and Isotopes, 67(3), p.488 - 491, 2009/03

 被引用回数:4 パーセンタイル:30.6(Chemistry, Inorganic & Nuclear)

原子力機構高崎量子応用研究所のイオン加速器施設(TIARA)のマイクロビームにおいて、芝浦工業大学との共同研究で、マスクレスイオンビームリソグラフィ技術の開発が進められている。マイクロビームサイズ評価とレンズ系の最適化、又は空間分解能として最小100nmのレベルの高空間分解能の測定手段を確立するために、開発している加工技術自身と電鋳技術との組合せにより二次電子マッピングに使用する標準試料としてNiレリーフパターンを作成した。本発表ではこの標準試料を用いて、100nmレベルの最小のビームサイズを測定することができたことを述べるとともに、その試料中をイオンが透過する際の散乱効果が測定結果に与える影響をモンテカルロシミュレーションコードを使用して評価した結果について報告する。

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